Permalloy films of 300Å thickness were prepared by d.c. magnetron sputtering onto LiNbO3 single crystal substrate excited by SAW at 45 MHz. Film structure such as shapes and size of grains was found to be drastically changed as a function of excited amplitude. Especially in the case of 24Åo-p for excited amplitude, films consisted of very fine homogeneous grains and showed magnetic softness, namely minimum coercive force. Uniaxial anisotropy was induced in plane for all the films examined; however, in the critical excited amplitude mentioned above, a drastic change of the easy axis in plane was found. As a conclusion, film preparation onto the substrate excited by SAW is considered to be a highly useful method to control the microscopical film structure and also the magnetic properties.
