The dependence of soft magnetic properties on the thickness and composition has been investigated for sputtered Fe-Co/ZnO multilayers. The coercivity decreases with the decrease in average size of crystallites D, in particular from 9 to 17 nm for all multilayers except Co/ZnO. Magnetic properties with Hc=160 A/m and μe(10 MHz)=800 are obtained for Fe/ZnO and 24Co-Fe/ZnO multilayers with D=2∼3 nm.
