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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

  • Investigation of Machining Processes
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Abstract

The in-process monitoring of surface shape of optical surfaces directly in the course of polishing is demonstrated to be accomplished through the confocal chromatic imaging technology. A linear relationship has been found between the deviation from square waveform and the variation of the workpiece surface shape.

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Authors and Affiliations

  1. Bakul Institute for Superhard Materials, National Academy of Sciences of Ukraine, vul. Avtozavods’ka 2, Kiev, 04074, Ukraine

    Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev & O. Yu. Filativ

  2. École Nationale Supérieure de Mécanique et des Microtechniques, 26, rue de l’épitaphe CS 51813, 25030, Besançon, France

    G. Monteil

Authors
  1. Yu. D. Filatov
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  2. V. I. Sidorko
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  3. S. V. Kovalev
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  4. O. Yu. Filativ
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  5. G. Monteil
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Corresponding author

Correspondence to Yu. D. Filatov.

Additional information

Original Russian Text © Yu.D. Filatov, V.I. Sidorko, S.V. Kovalev, O.Yu. Filativ, G. Monteil, 2017, published in Sverkhtverdye Materialy, 2017, Vol. 39, No. 4, pp. 80–87.

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Filatov, Y.D., Sidorko, V.I., Kovalev, S.V. et al. In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing. J. Superhard Mater. 39, 282–287 (2017). https://doi.org/10.3103/S1063457617040086

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  • DOI: https://doi.org/10.3103/S1063457617040086

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