Skip to main content
SpringerLink
Log in

Characteristics of dielectric film charging, depending on their thickness upon electron irradiation

  • Proceedings of the XVIII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Used in Solid-State Physics SEM-2013
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Basic principles of charging dielectric films on conducting substrates upon irradiation with electrons of average energy are considered. A ratio associating the equilibrium charging potential and the mean thickness of the dielectric film is calculated. The analytical expression is in good agreement with experimental results over a wide range of energies for electrons irradiating the target.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Miyake, H., Nitta, K., Takeda, Y., et al., J. Vac. Soc. Jpn., 2007, vol. 50, no. 6, p. 378.

    Article  Google Scholar 

  2. Liu, W., Ingino, J., and Pease, R., J. Vac. Sci. Techol. B, 1995, vol. 13, p. 1979.

    Article  ADS  Google Scholar 

  3. Bai, M., Pease, R., Tanasa, C., et al., J. Vac. Sci. Technol. B, 1999, vol. 17, p. 2893.

    Article  Google Scholar 

  4. Yasuda, M., Morimoto, K., Kainuma, Y., et al., Jpn. J. Appl. Phys., 2008, vol. 47, p. 4890.

    Article  ADS  Google Scholar 

  5. Balcon, N., Payan, D., Belhaj, M., et al., IEEE Trans. Plasma Sci., 2012, vol. 40, p. 282.

    Article  ADS  Google Scholar 

  6. Aris, F.C., Daves, P.M., and Lewis, T.J., J. Phys. C: Sol. State. Phys., 1976, vol. 9, p. 797.

    Article  ADS  Google Scholar 

  7. Bai, M., Pease, R., and Meisburger, D., J. Vac. Sci. Technol. B, 2003, vol. 21, p. 2638.

    Article  Google Scholar 

  8. Glavatskikh, I.A., Kortov, V.S., and Fitting, H.-J., J. Appl. Phys., 2001, vol. 89, p. 440.

    Article  ADS  Google Scholar 

  9. Gong, H., Song, Z., and Ong, C., J. Phys: Condens. Matter, 1997, vol. 9, p. 5027.

    ADS  Google Scholar 

  10. Li, W.-Q. and Zhang, H.-B., Appl. Surf. Sci., 2010, vol. 256, p. 3482.

    Article  ADS  Google Scholar 

  11. Rau, E.I., Evstaf’eva, E.N., and Andrianov, M.V., Phys. Solid State, 2008, vol. 50, no. 4, p. 621.

    Article  ADS  Google Scholar 

  12. Evstaf’eva, E.N., Rau, E.I., and Tatarintsev, A.A., Moscow Univ. Phys. Bull., 2013, vol. 68, no. 2, p. 128.

    Article  ADS  Google Scholar 

  13. Rau, E.I., Evstaf’eva, E.N., Zaitsev, S.I., et al., Russ. Microelectron., 2013, vol. 42, no. 2, p. 89.

    Article  Google Scholar 

  14. Cazaux, J., J. Appl. Phys., 1999, vol. 85, p. 1137.

    Article  ADS  Google Scholar 

  15. Blaise, G., Pesty, F., and Garoche, P., J. Appl. Phys., 2009, vol. 105, pp. 034101–01.

    Article  ADS  Google Scholar 

  16. Oliveira, L.N. and Gross, B., J. Appl. Phys., 1975, vol. 46, p. 3132.

    Article  ADS  Google Scholar 

  17. Lin, Y. and Joy, D.C., Surf. Interface Anal., 2005, vol. 37, p. 895.

    Article  Google Scholar 

  18. Seiler, H., J. Appl. Phys., 1983, vol. 54, p. R1.

    Article  ADS  Google Scholar 

  19. Boubaya, M. and Blaise, G., Eur. Phys. J. Appl. Phys., 2007, vol. 37, p. 79.

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Faculty of Physics, Moscow State University, Moscow, 119991, Russia

    E. N. Evstaf’eva & E. I. Rau

  2. Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka, 142432, Russia

    A. V. Gostev, E. I. Rau & A. A. Tatarintsev

  3. Institute of Nanotechnologies and Microelectronics, Russian Academy of Sciences, Moscow, 119991, Russia

    A. M. Tagachenkov

Authors
  1. A. V. Gostev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. N. Evstaf’eva
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. E. I. Rau
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. M. Tagachenkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. A. Tatarintsev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to E. I. Rau.

Additional information

Original Russian Text © A.V. Gostev, E.N. Evstaf’eva, E.I. Rau, A.M. Tagachenkov, A.A. Tatarintsev, 2014, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2014, Vol. 78, No. 9, pp. 1071–1076.

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Gostev, A.V., Evstaf’eva, E.N., Rau, E.I. et al. Characteristics of dielectric film charging, depending on their thickness upon electron irradiation. Bull. Russ. Acad. Sci. Phys. 78, 833–838 (2014). https://doi.org/10.3103/S106287381409007X

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3103/S106287381409007X

Keywords

Search

Navigation