The yttria-stabilized zirconia precursors of x mol% Y₂O₃/(100 − x) mol% ZrO₂ was successfully synthesized by homogeneous precipitation method by microwave heating. The Raman spectroscopy and Fourier Transform Infrared Spectroscopy (FT-IR) measurements clarified that the precursor contained zirconium hydroxide. The crystallization behaviors of the precursor were investigated by the X-ray diffraction, Raman spectroscopy, FT-IR, and Differential Scanning Calorimetry (DSC) measurements. For the FT-IR measurements only Zr–O bond was appeared at 500°C. By the DSC measurements revealed that the crystallization temperature of the precursor with microwave heating was lower, and the density was higher than that of conventional heating. This advance could cause by microwave technique.