High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films
Published version
Peer-reviewed
Repository URI
Repository DOI
Type
Article
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Authors
Zhang, Bowen
Yun, Chao
MacManus-Driscoll, Judith L.
Abstract
Highlights: A new way to achieve high yield and large area oxide thin film transfer is developed. Three different film compositions are demonstrated: SrRuO3, CeO2, and CeO2/STO nanocomposite films. Cracks, wrinkles, and damages are prevented by the new transfer method. They are commonly introduced by conventional transfer processes. Vertically aligned nanocomposite (VAN) structures can further improve the transfer yield. Possible mechanisms related to increased fracture toughness are proposed. We have opened up a route to large-scale oxide thin-film-based electronic device applications.
Description
Keywords
Article, 2D materials, Free-standing oxide thin films, High yield transfer, Wet etching, Crack prevention
Journal Title
Nano-Micro Letters
Conference Name
Journal ISSN
2311-6706
2150-5551
2150-5551
Volume Title
13
Publisher
Springer Singapore