Annotation of the article
Issue N7 2020 year
DOI: 10.17587/nmst.22.375-380
Solubility of Impurities in Silicon Nanocrystals
Bulyarskiy S.V., D. Sc., Senior Researcher, e-mail: bulyar2954@mail.ru, Institute of Nanotechnology of Microelectronics RAS, Moscow, Svetukhin V.V., Professor, Director, Scientific and Production Complex Technology Center Moscow
The authors have developed a thermodynamics of the solubility of impurities in nanocrystals. The solubility is influenced by the surface energy of the nanocrystal, therefore, with a decrease in its size, the solubility of the impurity decreases, then becomes discrete in it, i.e. a countable number of atoms are dissolved only. In nanocrystals smaller than a certain size, the impurity cannot be dissolved. The calculations apply to silicon nanocrystals in the oxide of this material.
Keywords: nanocrystals, solubility of impurities, surface effect
pp. 375 - 380
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