High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) An International Journal

ISSN for PRINT: 1093-3611

For Online Access

Best Paper Award Selection - Editorial Board Site

2007, Volume11

Issue 4

161 pages

DOI: 10.1615/HighTempMatProc.v11.i4

Issue price - $168.00

V. A. Titov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia

V. V. Rybkin
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia

S. A. Smirnov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia

A. L. Kulentsan
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia

H.-S. Choi
Department of Chemical Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon, 305-764, Korea

The characteristics of atmospheric pressure air glow discharge with liquid cathode have been investigated. Distilled water and aqueous solutions of KCl, and CuCl₂ were utilized as a cathode. The cathode voltage drop, electric field strength, and emission intensity of some bands for N₂ and OH were measured at discharge current from 10 to 50 mA. Gas temperatures and effective vibration temperatures of N₂ and OH were estimated on the base of spectral measurements. The reduced electric field strength and γ emission coefficients were calculated also. The electron energy distribution function (EEDF) and some electron parameters (average energy, electron density) were estimated on the base of numerical solution of the Boltzmann kinetic equation.

DOI: 10.1615/HighTempMatProc.v11.i4.40 Download article, 515-525 pages

Article price - $35.00

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