Skip to main content
SpringerLink
Log in

ZnO Thin Film Transistors for Flexible Electronics

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

In flexible electronics, plastic substrates can limit processing temperatures to less than 100° C. Consequently, most semiconductors, including amorphous silicon, may be incompatible with temperature-sensitive plastic substrates. While organic semiconductors may seem well suited to this particular application niche, their stability is questionable and their mobility is often low (∼0.1 cm2/V-s). In this paper we show that ZnO is a promising semiconductor candidate for flexible electronics, because thin film transistors can be fabricated at room temperature with higher mobility (> 1 cm2/V-s) and high on/off ratio (> 104).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. N. Parsons, C-S Yang, T. M. Klein, and L. Smith, Mat. Res. Symp. Proc. 507, 19 , 1998.

    Article  Google Scholar 

  2. P. M. Smith, P.G. Carey, T.W. Sigmon, Appl. Phys. Lett. 70, 342 (1997).

    Article  CAS  Google Scholar 

  3. A.R. Brown, C. P. Jarrett, D. M. de Leeuw, and M. Matters, Synthetic Metals 88, 37 (1997).

    Article  CAS  Google Scholar 

  4. H. E. Katz, J. Mater. Chem. 7, 369 (1997).

    Article  CAS  Google Scholar 

  5. Z. Bao, A. J. Lovinger, and J. Brown, J. Am. Chem. Soc. 120, 207 (1998)

    Article  CAS  Google Scholar 

  6. H. E. Katz, J. Johnson, A. J. Lovinger, and W. Li, J. Am. Chem. Soc. 122, 7787 (2000)

    Article  CAS  Google Scholar 

  7. P.F. Carcia, R. S. McLean, M. H. Reilly, and G. Nunes, Jr., Appl. Phys. Lett. 82, 1117 (2003).

    Article  CAS  Google Scholar 

  8. Landolt-Bornstein, Semiconductors 17, (Springer-Verlag, Berlin, Germany, 1982) p. 35ff.

    Google Scholar 

  9. S. M. Sze, Physics of Semiconductor Devices, (Wiley, New York, 1981) p. 442.

    Google Scholar 

  10. J. Levinson, F. R. Shepherd, P. J. Scanlon, W. D. Westwood, G. Este, and M. Rider,J. Appl. Phys. 53, 1193 (1982).

    Article  CAS  Google Scholar 

  11. R. A. Swalin, Thermodynamics of Solids (Wiley & Sons, New York, 1972) p 335 ff.

    Google Scholar 

  12. B. D. Cullity, Elements of X-ray Diffraction, (Addison-Wesley, Reading, MA, 1967) p. 99.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. DuPont Research & Development, Experimental Station, Wilmington, DE, 19880-0356, USA

    P. F. Carcia, R. S. McLean, M. H. Reilly, I. Malajovich, K. G. Sharp, S. Agrawal & G. Nunes

Authors
  1. P. F. Carcia
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. S. McLean
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. H. Reilly
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. I. Malajovich
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. K. G. Sharp
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. Agrawal
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. G. Nunes
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Carcia, P.F., McLean, R.S., Reilly, M.H. et al. ZnO Thin Film Transistors for Flexible Electronics. MRS Online Proceedings Library 769, 72 (2003). https://doi.org/10.1557/PROC-769-H7.2

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-769-H7.2

Search

Navigation