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Electron Energy Loss Microspectroscopy: Small Particles in Silicon

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The method of electron energy loss spectroscopy in a transmission electron microscope is applied to the analysis of small particles in silicon. Elemental and chemical microanalysis is demonstrated on nitrogen and oxygen-associated defects in silicon, using silicon-based standards.

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Author notes

  1. H. L. Tsai

    Present address: Texas Instruments, Dallas, TX, 75265, USA

Authors and Affiliations

  1. Center for Solid State Science, Arizona State University, Tempe, AZ, 85287, USA

    W. M. Skiff, H. L. Tsai & R. W. Carpenter

Authors
  1. W. M. Skiff
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  2. H. L. Tsai
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  3. R. W. Carpenter
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Skiff, W.M., Tsai, H.L. & Carpenter, R.W. Electron Energy Loss Microspectroscopy: Small Particles in Silicon. MRS Online Proceedings Library 59, 241–247 (1985). https://doi.org/10.1557/PROC-59-241

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  • DOI: https://doi.org/10.1557/PROC-59-241

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