Abstract
An organic film of a few nm in thickness was applied as a resist for photolithography and scanning probe lithography. This resist film was prepared on an oxide-covered Si substrate through chemisorption and spontaneous organization of organosilane molecules, e.g., n-octadecyltrimethoxysilane. The film belongs to a class of materials referred to as self-assembled monolayer (SAM). A SAM/Si sample was irradiated through a photomask with vacuum ultraviolet (VUV) light at a wavelength of 172 nm. The photomask image was transferred to the SAM through the decomposition of the SAM. Furthermore, we demonstrate nano-scale patterning of the SAM using an atomic force microscope (AFM) with an electrically conductive probe. The SAM was electrochemically degraded in the region where the AFM probe had been scanned. Both the photo-printed and AFM-genereated patterns were successfully transferred into the Si substrates based on wet chemical etching or on dry plasma etching. At present, using these VUV and AFM-based lithographies, we have succeeded in fabricating minute features of 2 μm and 20 nm in width, respectively.
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References
E. P. Plueddemann, Silane Coupling Reagents (Plenum Press: New York, 1991)
J. Sagiv, J. Am. Chem. Soc. 102, 92 (1980).
S. R. Wasserman, Y.-T. Tao and G. M. Whitesides, Langmuir 5, 1,074 (1989).
W. J. Dressick and J. M. Calvert, Jpn. J. Appl. Phys. 32, 5829 (1993).
M. J. Lercel, R. C. Tiberio, P. F. Chapman, H. G. Craighead, C. W. Sheen, A. N. Parikh and D. L. Allara, J. Vac. Sci. Technol. B 11, 2823 (1993).
C. R. K. Marrian, F. K. Perkins, S. L. Brandow, T. S. Koloski, E. A. Dobisz, and J. M. Calvert, Appl. Phys. Lett. 64, 390 (1994).
H. Sugimura and N. Nakagiri, Langmuir 11, 3623 (1995).
H. Sugimura and N. Nakagiri, J. Photopolym. Sci. Technol. 10, 661 (1997).
A. Hozumi, K. Ushiyama, H. Sugimura and Osamu Takai, Langmuir 15, 7600 (1999).
B. Lee and N. A. Clark, Langmuir 14, 5498 (1998).
H. Sugimura and N. Nakagiri, Appl. Phys. A 66, S427 (1998).
Y. Suzuki and M. Shin-Ogi Jpn. J. Appl. Phys. 29, L1517 (1990).
H. Brunner, T. Vallant, U. Mayer and H. Hoffmann, Langmuir 12, 4614 (1996).
H. Sugimura O. Takai and N. Nakagiri, J. Vac. Sci. Technol. B 17, p. 1605 (1999).
H. Sugimura K. Ushiyama, A. Hozumi and Osamu Takai, Langmuir, in press.
H. Sugimura T. Uchida, N. Kitamura and H. Masuhara, J. Phys. Chem. 98, 4352 (1994).
H. Sugimura and N. Nakagiri, Nanotechnology 8, A 15 (1997).
Acknowledgments
This research has been supported by Grant-in-Aid for Scientific Research by the Ministry of Education, Science, Sports and Culture, Japan.
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Sugimura, H., Hanji, T., Takai, O. et al. Photo and Scanning Probe Lithography Using Alkylsilane Self-Assembled Monolayers. MRS Online Proceedings Library 584, 163–168 (1999). https://doi.org/10.1557/PROC-584-163
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DOI: https://doi.org/10.1557/PROC-584-163