Abstract
A general route to organic-inorganic hybrids with nanophase morphologies has been elaborated with the objective of ultimately templating nanoporosity in organosilicates. A key feature of the hybrids is the preparation of well-defined macromolecules bearing significant functionality to interact with the organosilicates. The use of living polymerization methods allows the synthesis of polymers with accurate control of molecular weight, polydispersity, and chain ends. We have demonstrated living polymerizations from dendritic and hyperbranched initiators to produce controlled branched, star and hyperstar macromolecules. These polymers are used as structure directing agents to organize organosilicates into nanostructures. Once the macromolecular species has templated or organized the inorganic component, the organic polymer can be selectively removed by thermolysis to produce a nanoporous inorganic structure. The size and shape of the pores are similar to those of the initial hybrid morphology. A significant reduction in the dielectric constant of these insulating materials is achieved simply by replacing a portion of the glass matrix with air which has a dielectric constant of 1.
Similar content being viewed by others
References
R. R. Tummala and E. J. Rymaszewski, in Microelectronics Packaging Handbook (Van Nostrand Reinhold, New York, 1989a), Chap. 1.
S. P. Muraka, Solid State Technol, 83 (1986)
S-P. Jang, R. H. Havemann and M. C. Chang in Advanced Metallization for Devices and Circuits-Science, Technology, and Manufacturability, edited by S. P. Muraka, A. Katz, K. N. Tu and K. Maex (Mater. Res. Soc. Symp. Proc. 337, Pittsburg, PA, 1994), p. 25
P. Singer, Semicond. Int., 88 (May 1996).
D. J. Brinker and G. W. Scherrer, in Sol-Gel Science, The Physics and Chemistry of Sol-Gel Processing (Academic Press, New York, 1990).
G. W. Scherrer, J. Non-Cryst. Solids 87, 199 (1986).
Y. Charlier, J. L. Hedrick, T. P. Russell, W. Volksen, Polymer 36, 987 (1995).
Y. Chujo and T. Saegusa, Adv. Polym. Sci. 100, 12 (1991); J. Wen and G. L. Wilkes, Chem. Mater. 8, 667 (1996); L. Mascia, Trends Polym. Sci. 3(2), 61 (1995).
B. M. Novak, Adv. Mater. 5, 422 (1993).
J. L. Hedrick, C. J. Hawker, R. D. Miller, R. Twieg, S. A. Srinivasan, M. Trollsgs, Macromolecules, in press.
M. Johansson, E. Malmströnm, A. Hult, J. Polym. Sci.: Part A: Chem. Ed. 31, 619 (1993)
E. Mahnströnm, M. Johansson, A. Hult, Macromolecules 28, 1698 (1995)
H. Ihre, A. Hult, E. Soderlind, I. Anm Chem. Soc. 118, 6388 (1996).
M. Trollsås, J. L. Hedrick, D. Mecerreyes, Ph. Dubois, R. Jérô me, H. Ihre, A. Hult, Macromolecules 30, 8508 (1997).
B. Plage and H. Schulter, Macromolecules 23, 2642 (1990).
A. Lofgreen, A.-C. Albertsson, P. Dubois, R. Jérôme, Rev. Macromol. Chem. Phys. C35 (3), 379–418 (1995).
M. Trollsås, C. Hawker, J. Remenar, J. L. Hedrick, H. Ihre, A. Hult, J. Polym. Sci.: Poly. Chem. Ed., submitted (1998).
J. S. Moore and S. I. Stupp, Macromolecules 23, 65 (1990).
M. Trollsås and J. L. Hedrick, Macromolecules, submitted (1998).
J. Remenar, C. J. Hawker, J. L. Hedrick, R. D. Miller, D. Y. Yoon, S. M. Kim, M. Trollsis, Polymer Preprints 39 (1), 631 (1998).
Author information
Authors and Affiliations
Additional information
Authors to whom all correspondence should be addressed
Rights and permissions
About this article
Cite this article
Hedrick, L., Hawker, C.J., Trollsås, M. et al. Templating Nanoporosity in Organosilicates Using Well-Defined Branched Macromolecules. MRS Online Proceedings Library 519, 65–75 (1998). https://doi.org/10.1557/PROC-519-65
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-519-65