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Ablation of Si and Ge Using UV Femtosecond Laser Pulses

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Abstract

Laser ablation of silicon and germanium was carried out in moderate vacuum with l00fs to 400fs pulses at 248nm and intensities up to 3x1013 W/cm2. Evidence for non-thermal material removal was found. Imaged multishot ablation patterns display the intensity dependentself-structuring effect, forming well-known columnar structures. It is shown that continued irradiation of these structures eventually results in comparatively clean ablation. An increase of ablation rate with depth was observed. The reason is an intensity enhancement inside the pits by reflective focussing to a level where bond-breaking takes place. Furthermore, it was noticed that ablation contours can be significantly improved by electrically grounding the target.

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References

  1. S. Preuss, E. Matthias, M. Stuke, Appl. Phys. A 59, 79 (1994).

    Article  Google Scholar 

  2. S. Kiiper, M. Stuke, Microelectronic Engineering 9, 475 (1989).

    Article  Google Scholar 

  3. W. Kautek, J. Krüger, SPIE Proc. Vol. 2207, paper no. 77 (1994).

    Google Scholar 

  4. J. Ihlemann, A. Scholl, H. Schmidt, B. Wolff-Rottke, Appl. Phys. A 60, 411 (1995).

    Article  Google Scholar 

  5. S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A 61, 33 (1995).

    Article  Google Scholar 

  6. P. Stampfli, K.H. Bennemann, Appl. Phys. A 60, 191 (1995).

    Article  Google Scholar 

  7. D.F. Price, R.M. More, R.S. Walling, G. Guethlein, R.L. Shepherd, R.E. Steward, W.E. White, Phys. Rev. Lett. 75, 252 (1995).

    Article  CAS  Google Scholar 

  8. S. Szatmári, F.P. Schäfer, Appl. Phys. B 46, 305 (1988); Optics Comm. 68, 196 (1988).

    Article  Google Scholar 

  9. S.R. Foltyn, R.C. Dye, K.C. Ott, K.M. Hubbard, W. Hutchinson, R.E. Muenchausen, R.C. Estler, X.D. Wu, Appl. Phys. Lett. 59, 594 (1991).

    Article  CAS  Google Scholar 

  10. B.W. Sanders and M.L. Post in Laser Ablation in Materials Processing:Fundamentals and Applications, edited by B. Braren, J.J. Dubowski, D.P. Norton (Mat. Res. Soc. Proc. 285, Pittsburgh, PA, 1993) pp. 427–432.

  11. T. Venkatesan, in Laser Ablation, edited by J.C. Miller (Springer Ser. Mat. Sci. 28, Springer Verlag Berlin Heidelberg 1994) pp. 85–106.

  12. V.P. Veiko, S.M. Metev, A.I. Kaidanov, M.N. Libenson, E.B. Jakolev, J. Phys. D: Appl. Phys., 13, 1565 (1980)

    Article  CAS  Google Scholar 

  13. A.E. Siegman and P.M. Fauchet, IEEE J. Quantum. Electron. Q E 22, 1384 (1986)

    Article  Google Scholar 

  14. J. Hohlfeld, private communication

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Authors and Affiliations

  1. Deutsche Telekom, Forschungszentrum, Agastrasse, Berlin, D-12489, Germany

    G. Herbst & M. Steiner

  2. Laser-Laboratorium Göttingen, Hans-Adolf-Krebs-Weg 1, Göttingen, D-37077, Germany

    G. Marowsky

  3. Fachbereich Physik, Freie Universität Berlin, Arnimallee 14, Berlin, D-14195, Germany

    E. Matthias

Authors
  1. G. Herbst
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  2. M. Steiner
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  3. G. Marowsky
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  4. E. Matthias
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Herbst, G., Steiner, M., Marowsky, G. et al. Ablation of Si and Ge Using UV Femtosecond Laser Pulses. MRS Online Proceedings Library 397, 69–74 (1995). https://doi.org/10.1557/PROC-397-69

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  • DOI: https://doi.org/10.1557/PROC-397-69

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