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Scanning Conduction Microscopy: A Method of Probing Abrasion of Insulating Thin Films on Conducting Substrates

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Abstract

The use of Scanning Force Microscopy (SFM) to probe wear processes at interfaces is of considerable interest. We present here a simple modification of the SFM which allows us to make highly spatially resolved measurements of conductivity changes produced by abrasion of thin insulating films on metal substrates. The technique is demonstrated on fluorocarbon polymer thin films deposited on stainless steel substrates.

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References

  1. J. T. Dickinson, L. C. Jensen, K. H. Siek, and K. W. Hipps, to appear in Rev. Sci. Instrum. 66 (1995).

  2. L. A. Wenzler, T. Han, R. S. Bryner, and T. P. Beebe, Rev. Sci. Instrum. 65, 85 (1994).

    Article  CAS  Google Scholar 

  3. M. Anders, M. Mück, and C. Heiden, J. Vac. Sci. Technol. A 8, 394 (1990).

    Article  CAS  Google Scholar 

  4. J. Snauwaert, L. Hellemans, I. Czech, T. Clarysse, W. Vandervorst, and M. Pawlik, J. Vac. Sci. Technol. B 12 (1), 304 (1994).

    Article  CAS  Google Scholar 

  5. M. Anders, M. Mueck, and C. Heiden, J. Vac. Sci. Technol. A 8, 394 (1990).

    Article  CAS  Google Scholar 

  6. Digital Instruments, Inc., Santa Barbara, CA

  7. Graciela B. Blanchet and S. Ishmat Shah, Appl. Phys. Lett. 62 1026 (1993).

    Article  CAS  Google Scholar 

  8. G. B. Blanchet, C. R. Fincher, Jr., C. L. Jackson, S. I. Shah, and K. H. Gardner, Science 262, 719(1993).

    Article  CAS  Google Scholar 

  9. Wenbiao Jiang, M. G. Norton, Lancy Tsung, and J. T. Dickinson, J. Mater. Res. 10, 1038 (1995).

    Article  CAS  Google Scholar 

  10. Sunkyo Lee, L. C. Jensen, S. C. Langford, and J. T. Dickinson, J. Adhesion Sci. Technol. 9. 1 (1995).

    Article  Google Scholar 

  11. L. Scudiero, J. T. Dickinson, L. C. Jensen, and S. C. Langford, J. Adhesion Sci. Technol. 9, 27 (1995).

    Article  CAS  Google Scholar 

  12. R. G. Horn and D. T. Smith, Science 256, 362 (1992).

    Article  CAS  Google Scholar 

  13. J. T. Dickinson, S. C. Langford, and L. C. Jensen, J. Mater. Res. 8, 2921 (1993).

    Article  CAS  Google Scholar 

  14. R. E. Thomson and J. Moreland, “Development of highly conductive cantilevers for atomic force microscopy point contact measurements,” to be submitted.

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Dickinson, J.T., Hipps, K.W. Scanning Conduction Microscopy: A Method of Probing Abrasion of Insulating Thin Films on Conducting Substrates. MRS Online Proceedings Library 385, 221–226 (1995). https://doi.org/10.1557/PROC-385-221

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  • DOI: https://doi.org/10.1557/PROC-385-221

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