Abstract
Experimental data on the 248 nm and 308 nm wavelength excimer laser ablation of poly(tetrafluoroethylene) (PTFE) doped with polyimide (PI) are reported for a range of fluences and dopant concentrations. Threshold fluences were determined and correlated with the dopant concentrations. The threshold fluences and the limiting etch rates measured at high fluences decreased with increasing dopant concentration and there is a minimum absorption coefficient below which there is no ablation at both the wavelengths. The etch rates have been modeled using a two parameter Arrhenius thermal model to describe the etching process.
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Acknowledgements
G. C. D’Couto and S. V. Babu gratefully acknowledge the financial support of IBM, Endicott for the work performed at Clarkson University.
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D’Couto, G.C., Babu, S.V., Egitto, F.D. et al. A Comparative Study of the Photoablation of Polyimide-Doped Poly(Tetrafluoroethylene) at 308 NM and 248 NM. MRS Online Proceedings Library 285, 157–162 (1992). https://doi.org/10.1557/PROC-285-157
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DOI: https://doi.org/10.1557/PROC-285-157