Abstract
Trilayer concentric metallic-piezoelectric-metallic microtubes are fabricated by infiltrating porous Si templates with sol precursors. LaNiO3 (LNO) is used as the inner and outer electrode material and PbZrTiO3 (PZT) is the middle piezoelectric layer. Structure of the microtubes is characterized in details using scanning and transmission electron microscopy which are equipped with energy dispersive X-ray spectroscopy for elemental mapping. The hysteresis of a trilayered thin film structure of LNO-PZT-LNO is shown. This trilayered tubes might find applications in inkjet printing.
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Fan, H.J., Kawasaki, S., Gregg, J.M. et al. Concentric Metallic-Piezoelectric Microtube Arrays. MRS Online Proceedings Library 1071, 10710107 (2007). https://doi.org/10.1557/PROC-1071-F01-07
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DOI: https://doi.org/10.1557/PROC-1071-F01-07