Abstract
We have studied the heteroepitaxial growth of 3C–SiC film on an Si(100) substrate by plasma chemical vapor deposition using monomethylsilane, a single-molecule gas containing both Si and C atoms. We have tried to introduce an interval process, in which we decrease the substrate temperature for a few minutes at a suitable stage of film growth. It was expected that, during the interval process, stabilization such as desorption of nonreacted precursors and lateral diffusion of species produced at the initial stage of film growth would occur. From the results, it appears that the interval process using a substrate temperature of 800 °C effectively suppresses polycrystallization of 3C–SiC growth on the Si(100) surface.
Similar content being viewed by others
References
R.P. Elliot: Constitution of Binary Alloys (McGraw-Hill, New York, 1965), p. 227.
T. Furusho, S.K. Lilov, S. Ohshima, and S. Nishino: Crystal growth of silicon carbide in hydrogen atmosphere by sublimation close space technique. J. Cryst. Growth 237, 1235 (2002).
D. Hofmann, M. Bickermann, R. Eckstein, M. Kolbl, St. G. Muller, E. Schmitt, A. Weber, and A. Winnacker: Sublimation growth of silicon carbide bulk crystals: Experimental and theoretical studies on defect formation and growth rate augmentation. J. Cryst. Growth 198, 1005 (1999).
S.Yu. Karpov, A.V. Kulik, I.A. Zhmakin, Yu.N. Makarov, E.N. Mokhov, M.G. Ramm, M.S. Ramm, A.D. Roenkov, and Yu.A. Vodakov: Analysis of sublimation growth of bulk SiC crystals in tantalum container. J. Cryst. Growth 211, 347 (2000).
P. Masri: Silicon carbide and silicon carbide-based structures: The physics of epitaxy. Surf. Sci. Rep. 48, 1 (2002).
Y. Furumura, M. Doki, F. Mieno, T. Eshita, T. Suzuki, and M. Maeda: Heteroepitaxial beta-SiC on Si. J. Electrochem. Soc. 135, 1225 (1988).
T. Sugii, T. Aoyama, and T. Ito: Low-temperature growth of beta-SiC on Si by gas-source MBE. J. Electrochem. Soc. 137, 989 (1990).
K.W. Lee, K.W. Yu, J.H. Boo, Y. Kim, T. Hatayama, T. Kimoto, and H. Matsunami: Epitaxial growth of cubic SiC films on Si substrates by high vacuum chemical vapor deposition using 1, 3-disilabutane. J. Electrochem. Soc. 144, 1474 (1997).
J.A. Powell, L.G. Matus, and M.A. Kuczmarski: Growth and characterization of cubic SiC single-crystal films on Si. J. Electrochem. Soc. 134, 1558 (1987).
H.P. Liaw and R.F. Davis: Thermal stresses in heteroepitaxial beta silicon carbide thin films grown on silicon substrates. J. Electrochem. Soc. 131, 3014 (1984).
S. Nishino, J.A. Powell, and H.A. Will: Production of large-area single-crystal wafers of cubic SiC for semiconductor devices. Appl. Phys. Lett. 42, 460 (1983).
S. Nishino, H. Suhara, H. Ono, and H. Matsunami: Epitaxial growth and electric characteristics of cubic Sic on silicon. J. Appl. Phys. 61, 4889 (1987).
H. Matsunami: Progress in epitaxial growth of SiC. Physica B 185, 65 (1993).
P. Pirouz, C.M. Chorey, and J.A. Powell: Antiphase boundaries in epitaxially grown beta-SiC. Appl. Phys. Lett. 50, 221 (1987).
K. Shibahara, S. Nishino, and H. Matsunami: Antiphase-domain-free growth of cubic SiC on Si(100). Appl. Phys. 50, 1888 (1987).
C.W. Liu and J.C. Sturm: Low-temperature CVD growth of beta-SiC on (100) Si using methylsilane and device characteristics. J. Appl. Phys. 82, 4558 (1997).
Y. Fujiwara, E. Sakuma, S. Misawa, K. Endo, and S. Yoshida: Epitaxial growth of 3C-SiC on Si by low-pressure chemical vapor deposition. Appl. Phys. 49, 388 (1986).
K. Yasui, K. Asada, and T. Akahane: Epitaxial growth of 3C-SiC films on Si substrates by triode plasma CVD using dimethylsilane. Appl. Surf. Sci. 159, 556 (2000).
T. Matsutani, M. Kiuchi, T. Takeuchi, T. Matsumoto, K. Mimoto, and S. Goto: Deposition of 3C-SiC films using ECR plasma of methylsilane. Vacuum 59, 152 (2000).
K. Yasui, K. Asada, T. Maeda, and T. Akahane: Growth of high quality silicon carbide films on Si by triode plasma CVD using monomethylsilane. Appl. Surf. Sci. 175, 495 (2001).
H. Nakazawa, M. Suemitsu, and S. Asami: Gas-source MBE of SiC/Si using monomethylsilane. Thin Solid Films 369, 269 (2000).
K. Nishino, T. Kimoto, and H. Matsunami: Epitaxial growth of 3C-SiC on alpha-SiC substrates by chemical vapor deposition. In Silicon Carbide and Related Materials edited by M.G. Spencer, R.P. Devaty, J.A. Edmond, M.A. Khan, R. Kaplan and M. Rahman, Institute of Physics Conference Series Number 137 (IOP Publishing, Bristol and Philadelphia, 1994), p. 33.
Y. Gao, J.H. Edgar, J. Chaudhuri, S.N. Cheema, M.V. Sidorov, and D.N. Braski: Low-temperature chemical-vapor deposition of 3C-SiC films on Si(100) using SiH4-C2H4-HCl-H2. J. Cryst. Growth 191, 439 (1998).
Y. Chen, K. Matsumoto, Y. Nishio, T. Shirafuji, and S. Nishino: Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD. Mater. Sci. Eng. 61, 579 (1999).
K. Teker, C. Jacob, J. Chung, and M.H. Hong: Thin solid films: Epitaxial growth of 3C-SiC on Si(001) using hexamethyldisilane and comparison with growth on Si(111). Thin Solid Films 371, 53 (2000).
I. Goleck, F. Reidinger, and J. Marti: Single-crystalline, epitaxial cubic SiC films grown on (100) Si at 750 °C by chemical vapor deposition. Appl. Phys. Lett. 60, 1703 (1992).
Y. Ohshita: Reactants in SiC chemical vapor deposition using CH3SiH3 as a source gas. J. Cryst. Growth 147, 111 (1995).
K.C. Kim and C. Park II: Formation mechanism of interfacial voids in the growth of SiC films on Si substrates. J. Vac. Sci. Technol. 19, 2636 (2001).
M. Shinohara, T. Maehama, and M. Niwano: Adsorption and decomposition of methylsilanes on Si(100). Appl. Surf. Sci. 162, 161 (2000).
P.L. Silvestrelli, C. Sbraccia, and F. Ancilotto: J. Chem. Phys. 116, 6291 (2002).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Morikawa, Y., Hirai, M., Ohi, A. et al. Heteroepitaxial growth of 3C–SiC film on Si(100) substrate by plasma chemical vapor deposition using monomethylsilane. Journal of Materials Research 22, 1275–1280 (2007). https://doi.org/10.1557/jmr.2007.0151
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/jmr.2007.0151