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Studies on Control of Oxygen Vacancies in MOD-made BaTiO3 Thin Film by Nitrogen Annealing to Improve Resistive Switching Behavior for ReRAM Application

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Abstract

Metal Organic Decomposition (MOD)-made BaTiO3 (BT) thin films were prepared for Resistive Random Access Memory (ReRAM) under various annealing conditions and investigated for improving the properties of bipolar-type resistive switching, focusing on the relation between oxygen vacancies and the behavior of resistive hysteresis. BT thin films with both pre- and final- annealing in nitrogen showed the resistive hysteresis of bipolar-type switching with current ON/OFF ratios of 2 orders of magnitude for both bias polarities. Finally they showed the endurance property with the 106 switching cycles. It was suggested that oxygen vacancies near the oxide surface (both interfaces at metal electrode/oxide and between layer-by-layered oxide layers) are increased by N2 annealing and enhanced the interface-type resistive switching. Pre-annealing in N2 was also found to be very effective to improve endurance properties, implying that not only the electrode/oxide interface but also the middle part of the film would contribute the interface-type mechanism.

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Authors and Affiliations

  1. Kyoto Institute of Technology, Sakyo-ku Matsugasaki Kyoto, Japan

    S. Maejima, T. Sugie, K. Yamashita & M. Noda

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  1. S. Maejima
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  2. T. Sugie
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  3. K. Yamashita
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  4. M. Noda
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Maejima, S., Sugie, T., Yamashita, K. et al. Studies on Control of Oxygen Vacancies in MOD-made BaTiO3 Thin Film by Nitrogen Annealing to Improve Resistive Switching Behavior for ReRAM Application. MRS Advances 2, 235–240 (2017). https://doi.org/10.1557/adv.2017.10

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  • DOI: https://doi.org/10.1557/adv.2017.10

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