Abstract
Sol-gel processing methods are frequently used for the fabrication of lead zirconate titanate (PZT) thin films for many electronic applications. Our standard approach for film fabrication utilizes lead acetate and acetic acid modified metal alkoxides of zirconium and titanium in the preparation of our precursor solutions. This report highlights some of our recent results on the effects of the addition of a second chelating ligand, acetylacetone, to this process. We discuss the changes in film drying behavior, densification and ceramic microstructure which accompany acetylacetone additions to the precursor solution and relate the observed variations in processing behavior to differences in chemical precursor structure induced by the acetylacetone ligand. Improvements in thin film microstructure, ferroelectric and optical properties are observed when acetylacetone is added to the precursor solution.
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Schwartz, R.W., Assink, R.A., Dimos, D. et al. Effects of Acetylacetone Additions on PZT Thin Film Processing. MRS Online Proceedings Library 361, 377–387 (1994). https://doi.org/10.1557/PROC-361-377
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DOI: https://doi.org/10.1557/PROC-361-377