Abstract
We have determined the lattice location of ion implanted As in ZnO and GaN by means of conversion electron emission channeling from radioactive 73As. In contrast to what one might expect from its nature as a group V element, we find that As does not occupy substitutional O sites in ZnO but in its large majority substitutional Zn sites. Arsenic in ZnO is thus an interesting example for an impurity in a semiconductor where the major impurity lattice site is determined by atomic size and electronegativity rather than its position in the periodic system. In contrast, in GaN the preference of As for substitutional cation sites is less pronounced and about half of the implanted As atoms occupy Ga and the other half N sites. Apparently, the smaller size-mismatch between As and N and the chemical similarity of both elements make it feasible that As partly substitutes for N atoms.
Similar content being viewed by others
References
S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner, J. Vac. Sci. Tech. B 22, 932 (2004), and references therein.
D.C. Look, Semicond. Sci. Technol. 20, S55 (2005), and references therein.
Y.R. Ryu, S. Zhu, D.C. Look, J.M. Wrobel, H.M. Jeong, and H.W. White, J. Cryst. Growth 216, 330 (2000).
Y.R. Ryu, T.S. Lee, and H.W. White, Appl. Phys. Lett. 83, 87 (2003).
D.C. Look, G.M. Renlund, R.H. Burgener, and J.R. Sizelove, Appl. Phys. Lett. 85, 5269 (2004).
V. Vaithianathan, B. Lee, and S.S. Kim, Appl. Phys. Lett. 86, 062101 (2005).
G. Braunstein, A. Muraviev, H. Saxena, N. Dhere, V. Richter, and R. Kalish, Appl. Phys. Lett. 87, 192103 (2005).
V. Vaithianathan, B.T. Lee, C.H. Chang, K. Asokan, and S.S. Kim, Appl. Phys. Lett. 88, 112103 (2006).
H.S. Kang, G.H. Kim, D.L. Kim, H.W. Chang, B.D. Ahn, and S.Y. Lee, Appl. Phys. Lett. 89, 181103 (2006).
T. Aoki, Y. Shimizu, A. Miyake, A. Nakamura, Y. Nakanishi, and Y. Hatanaka, phys. stat. solidi (b) 229, 911 (2002).
F.X. Xiu, Z. Yang, L.J. Mandalapu, D.T. Zhao, J.L. Liu, and W.P. Beyermann, Appl. Phys. Lett. 87, 152101 (2005).
O. Lopatiuk-Tirpak, L. Chernyak, F.X. Xiu, J.L. Liu, S. Jang, F. Ren, S.J. Pearton, K. Gartsman, Y. Feldmann, A. Osinsky, and P. Chow, J. Appl. Phys. 100, 086101 (2006).
S. Limpijumnong, S.B. Zhang, S.H. Wei, and C.H. Park, Phys. Rev. Lett. 92, 155504 (2004).
S. Limpijumnong, M.F. Smith, and S.B. Zhang, Appl. Phys. Lett. 89, 222113 (2006).
J.I. Pankove and J.A. Hutchby, J. Appl. Phys. 47, 5376 (1976).
R.D. Metcalfe, D. Wickenden, and W.C. Clark, J. Lumin. 16, 405 (1978).
A.J. Winser, S.V. Novikov, C.S. Davis, T.S. Cheng, C.T. Foxon, and I. Harrison, Appl. Phys. Lett. 77, 2506 (2000).
B. Gil, A. Morel, T. Taliercio, P. Lefebvre, C.T. Foxon, I. Harrison, A.J.Winser, and S.V. Novikov, Appl. Phys. Lett. 79, 69 (2001).
A. Bell, F.A. Ponce, S.V. Novikov, C.T. Foxon, and I. Harrison, Appl. Phys. Lett. 79, 3239 (2001).
H.Y. Huang, J.Q. Xiao, C.S. Ku, H.M. Chung, W.K. Chen, W.H. Chen, M.C. Lee, and H.Y. Lee, J. Appl. Phys. 92, 4129 (2002).
C.T. Foxon, I. Harrison, S.V. Novikov, A.J. Winser, R.P. Campion, and T. Li, J. Phys.: Condens. Matter 14, 3383 (2002).
A. Stötzler, R. Weissenborn, M. Deicher, and the ISOLDE collaboration, MRS Internet J. Nitride Semicond. Research 5S1, W12.9 (2000), see also Mater Res. Soc. Symp. Proc. 595, W12.9 (2000).
X. Li, E.E. Reuter, S.G. Bishop, and J.J. Coleman, Appl. Phys. Lett. 72, 1990 (1998).
R. Kuroiwa, H. Asahi, K. Asami, S.J. Kim, K. Iwata, and S. Gonda, Appl. Phys. Lett. 73, 2630 (1998).
Y. Zhao, F. Deng, S.S. Lau, and C.W. Tu, J. Vac. Sci. Technol. B 16, 1297 (1998).
H. Na, H.J. Kim, E. Yoon, C. Sone, and Y. Park, J. Cryst. Growth 248, 437 (2003).
W.G. Bi and C.W. Tu, Appl. Phys. Lett. 70, 1608 (1997).
Y. Qiu, S.A. Nikishin, H. Temkin, N.N. Faleev, and Y.A. Kudriavtsev, Appl. Phys. Lett. 70, 3242 (1997).
C.G. Van De Walle and J. Neugebauer, Appl. Phys. Lett. 76, 1009 (2000).
L.E. Ramos, J. Furthmüller, J.R. Leite, L.M.R. Scolfaro, and F Bechstedt, Phys. Rev. B 68, 085209 (2003).
U.V. Desnica, N. Ravi, H. Andreasen, and H. De Waard, Solid State Comm. 60, 59 (1986).
U.V. Desnica, Solid State Comm. 69, 411 (1989).
U. Wahl, E. Rita, J.G. Correia, A.C. Marques, E. Alves, J.C. Soares, and the ISOLDE collaboration, Phys. Rev. Lett. 95, 215503 (2005).
U. Wahl, E. Rita, J.G. Correia, A.C. Marques, E. Alves, J.C. Soares, and the ISOLDE collaboration, accepted for publication in Superlattices and Microstructures.
U. Wahl, J.G. Correia, J.P. Araújo, E. Rita, J.C. Soares, and the ISOLDE collaboration, submitted to Appl. Phys. Lett.
H. Hofsäss and G. Lindner, Phys. Rep. 210, 121 (1991).
U. Wahl, J.G. Correia, A. Czermak, S.G. Jahn, P. Jalocha, J.G. Marques, A. Rudge, F. Schopper, J.C. Soares, A. Vantomme, P. Weilhammer, and the ISOLDE collaboration, Nucl. Instr. Meth. A 524, 245 (2004).
A.C. Marques, U. Wahl, J.G. Correia, M.R. Silva, A. Rudge, P. Weilhammer, J.C. Soares, and the ISOLDE collaboration, Nucl. Instr. Meth. A 572, 1056 (2007).
U. Wahl, A. Vantomme, G. Langouche, J.P. Araújo, L. Peralta, J.G. Correia, and the ISOLDE collaboration, J. Appl Phys. 88, 1319 (2000).
U. Wahl, E. Rita, J.G. Correia, E. Alves, J.P. Araújo, and the ISOLDE collaboration, Appl. Phys. Lett. 82, 1173 (2003).
U. Wahl, E. Rita, J.G. Correia, E. Alves, J.C. Soares, and the ISOLDE collaboration, Phys. Rev. B 69, 012102 (2004).
R.D. Shannon, Acta Cryst. A 32, 751 (1976).
The CRC Handbook of Chemistry and Physics, 50th edition, ed. R.C. Weast (CRC Press, Boca Raton 1970) p. F-152.
L. Bellaiche, S.H. Wei, and A. Zunger, Phys. Rev. B 54, 17568 (1996).
L. Bellaiche, S.H. Wei, and A. Zunger, Appl. Phys. Lett. 70, 3558 (1997).
L. Bellaiche, S.H. Wei, and A. Zunger, Phys. Rev. B 56, 10233 (1997).
T. Mattila and A. Zunger, Phys. Rev. B 58, 1367 (1998).
A. Zunger, phys. stat. sol. (b) 216, 117 (1999).
T. Mattila and A. Zunger, Phys. Rev. B 59, 9943 (1999).
C. Göbel, K. Petzke, C. Schrepel, and U. Scherz, Physica B 273, 759 (1999).
P.R.C. Kent and A. Zunger, Phys. Rev. B 64, 115208 (2001).
L.W. Wang, Phys. Rev. Lett. 88, 256402 (2002).
J. Li and L.W. Wang, Phys. Rev. B 67, 033102 (2003).
A Jenichen and C. Engler, phys. stat. sol. (b) 241, 1883 (2004).
N. Tit, J. Phys D: Appl. Phys. 39, 2514 (2006)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Wahl, U., Correia, J.G., Rita, E. et al. Arsenic in ZnO and GaN: Substitutional Cation or Anion Sites?. MRS Online Proceedings Library 994, 09940103 (2006). https://doi.org/10.1557/PROC-0994-F01-03
Received:
Accepted:
Published:
DOI: https://doi.org/10.1557/PROC-0994-F01-03