Skip to main content
SpringerLink
Log in

Raman Scattering Characterization of Implanted ZnO

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

In this work we investigate the lattice damage induced in ZnO implanted with potential group V acceptors by means of Raman scattering. ZnO samples were implanted with N and P to high doses and Raman spectra were obtained prior and after rapid thermal annealing (RTA). Characteristic disorder-activated modes are observed in the spectra that can be used to assess the degree of lattice damage. ZnO samples were also implanted with native Zn+ and O+ ions under similar conditions to study specific effects of implantation with N+ and P+. As revealed by the intensity of disorder-activated bands, the implantation induced lattice damage is considerably higher for Zn+ than for the lighter O+ ion. In samples implanted with N+ additional Raman peaks emerge that are not observed either in the samples implanted with the native Zn+ and O+ ions or in the samples implanted with P+, thus pointing to a local vibrational mode of N or a N complex as the origin of these modes. Disorder-activated features are fully removed by RTA, indicating a high degree of lattice recovery by RTA even for the heavily damaged ZnO samples implanted with Zn+.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. C. Look and B. Chaflin, Phys. Stat. Sol. (b) 241, 624 (2004).

    Article  CAS  Google Scholar 

  2. E-C Lee, Y-S Kim, Y-G Jin and K. J. Chang, Phys. Rev. B 64, 085120 (2001).

    Article  Google Scholar 

  3. G. Braunstein, A. Muraviev, H. Saxena, N. Dhere, V. Richter, and R. Kalish, Appl. Phys. Lett. 87, 192103 (2005).

    Article  Google Scholar 

  4. M. Suscavage, M. Harris, D. Bliss, P. Yip, S. Q. Wang, D. Schwall, L. Bouthillette, J. Bailey, M. Callahan, D. C. Look, D. C. Reynolds, R. L. Jones, and C. W. Litton, MRS Internet J. Nitride Semicond. Res. 4S1, G3.40 (1999).

    Google Scholar 

  5. J. Serrano, A. H. Romero, F. J. Manjón, R. Lauck, M. Cardona, and A. Rubio, Phys. Rev. B 69, 094306 (2004).

    Article  Google Scholar 

  6. F. Reuss, C. Kirchner, Th. Gruber, R. Kling, S. Maschek, W. Limmer, A. Waag, and P. Ziemann, J. Appl. Phys. 95, 3385 (2004).

    Article  CAS  Google Scholar 

  7. A. Kaschner, U. Haboek, M. Strassburg, M. Strassburg, G. Kaczmarczyk, Z. Zeuner, H. R. Alves, D. M. Hoffmann, and B. K. Meyer, Appl. Phys. Lett. 80, 1909 (2002).

    Article  CAS  Google Scholar 

  8. C. Bundesmann, N. Ashkenov, M. Schubert, D. Spemann, T. Butz, E. M. Kaidashev, M. Lorentz, and M. Grundmann, Appl. Phys. Lett. 83, 1974 (2003).

    Article  CAS  Google Scholar 

  9. J. B. Wang, H. M. Zhong, Z. F. Li, and W. Lu, Appl. Phys. Lett. 88, 101913 (2006).

    Article  Google Scholar 

  10. D. Pastor, J. Ibáñez, R. Cuscó, L. Artús, G. González-Díaz, and E. Calleja, Semicond. Sci. Technol. 22, 70 (2007).

    Article  CAS  Google Scholar 

  11. J. Yu, H, Xing, Q. Zhao, H. Mao, Y. Shen, J. Wang, Z. Lai, Z. Zhu, Solid State Commun. 138, 502 (2006).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Inst. Jaume Almera, C.S.I.C., C. Sole Sabaris sn, Barcelona, 08028, Spain

    Esther Alarcon-Llado, Ramon Cusco & Luis Artus

  2. Dep. Fisica Aplicada III, Univ. Complutense, Madrid, 28040, Spain

    German Gonzalez-Diaz & Ignacio Martil

  3. Dep. Fisica Materia Condensada, Univ. Valladolid, P. del Cauce sn, Valladolid, 47011, Spain

    Juan Jimenez

  4. Solid State Scientific Corporation, 27-2 Wright Road, Hollis, NH, 03049, USA

    Buguo Wang

  5. Sensors Directorate, Air Force Research Laboratory, Hanscom AFB, MA, 01731-2909, USA

    Michael Callahan

Authors
  1. Esther Alarcon-Llado
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ramon Cusco
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Luis Artus
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. German Gonzalez-Diaz
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ignacio Martil
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Juan Jimenez
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Buguo Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Michael Callahan
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Alarcon-Llado, E., Cusco, R., Artus, L. et al. Raman Scattering Characterization of Implanted ZnO. MRS Online Proceedings Library 957, 724 (2006). https://doi.org/10.1557/PROC-0957-K07-24

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1557/PROC-0957-K07-24

Search

Navigation