Abstract
Processes and preparation conditions for growing epitaxial thin films of Cu-based, layered oxychalcogenides LnCuOCh (Ln = La, Ce, Pr or Nd; Ch = S1-xSex or Se1-yTey) are reported. Epitaxial thin films on MgO (001) substrates were prepared by a reactive solid-phase epitaxy method. Four-axes high-resolution x-ray diffraction measurements revealed that the crystallographic orientation is (001)[110] LnCuOCh (001)[110] MgO and the internal stress of the crystalline lattices in the films are relaxed during thermal-annealing process of the reactive solid-phase epitaxy. Furthermore, except for CeCuOS, systematic variations in the lattice constant by chalcogen or lanthanide ion substitutions were observed. These results demonstrated that the reactive solid-phase epitaxy is an efficient technique for fabricating LnCuOCh epitaxial films.
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References
S. Nakamura, T. Mukai, M. Senoh, and N. Iwasa: Thermal annealing effects on p-type Mg-doped GaN films. Jpn. J. Appl. Phys. 31, L139 (1992).
I. Akasaki and H. Amano: Crystal growth and conductivity control of group III nitride semiconductors and their application to short wavelength light emitters. Jpn. J. Appl. Phys. 36, 5393 (1997).
H. Kawazoe, M. Yasukawa, H. Hyodo, M. Kurita, H. Yanagi, and H. Hosono: P-type electrical conduction in transparent thin films of CuAlO2. Nature 389, 939 (1997).
R.E. Stauber, J.D. Perkins, P.A. Parilla, and D.S. Ginley: Thin film growth of transparent p-type CuAlO2. Electrochem. Solid-State Lett. 2, 654 (1999).
N. Duan, A.W. Sleight, M.K. Jayaraj, and J. Tate: Transparent p-type conducting CuScO2+x films. Appl. Phys. Lett. 77, 1325 (2000).
R. Nagarajan, A.D. Draeseke, A.W. Sleight, and J. Tate: p-Type conductivity in CuCr1−xMgxO2 films and powders. J. Appl. Phys. 89, 8022 (2001).
H. Yanagi, T. Hase, S. Ibuki, K. Ueda, and H. Hosono: Bipolarity in electrical conduction of transparent oxide semiconductor CuInO2 with delafossite structure. Appl. Phys. Lett. 78, 1583 (2001).
H. Mizoguchi, M. Hirano, S. Fujitsu, T. Takeuchi, K. Ueda, and H. Hosono: ZnRh2O4: A p-type semiconducting oxide with a valence band composed of a low-spin state of Rh3+ in a 4d6 configuration. Appl. Phys. Lett. 80, 1207 (2002).
X. Nie, S-H. Wei, and S.B. Zhang: Bipolar doping and band-gap anomalies in delafossite transparent conductive oxides. Phys. Rev. Lett. 88, 066405 (2002).
K. Ueda, S. Inoue, S. Hirose, H. Kawazoe, and H. Hosono: Transparent p-type semiconductor: LaCuOS layered oxysulfide. Appl. Phys. Lett. 77, 2701 (2000).
K. Ueda, S. Inoue, H. Hosono, N. Sarukura, and M. Hirano: Room-temperature excitons in wide-gap layered-oxysulfide semiconductor: LaCuOS. Appl. Phys. Lett. 78, 2333 (2001).
K. Ueda and H. Hosono: Band gap engineering, band edge emission, and p-type conductivity in wide-gap LaCuOS1−xSex oxychalcogenides. J. Appl. Phys. 91, 4768 (2002).
K. Ueda, K. Takafuji, H. Hiramatsu, H. Ohta, T. Kamiya, M. Hirano, and H. Hosono: Electrical and optical properties and electronic structures of LnCuOS (Ln = La—Nd). Chem. Mater. 15, 3692 (2003).
M. Palazzi: Préparation et affinement de la structure de (LaO)CuS. C. R. Acad. Sc. Paris. 292, 789 (1981).
W.J. Zhu, Y.Z. Huang, C. Dong, and Z.X. Zhao: Synthesis and crystal structure of new rare-earth copper oxyselenides: RCuSeO (R = La, Sm, Gd and Y). Mater. Res. Bull. 29, 143 (1994).
B.A. Popovkin, A.M. Kusainova, V.A. Dolgikh, and L.G. Aksel’rud: New layered phases of the MOCuX (M = Ln, Bi; X = S, Se, Te) family: A geometric approach to the explanation of phase stability. Russ. J. Inorg. Chem. 43, 1471 (1998).
D.O. Charkin, A.V. Akopyan, and V.A. Dolgikh: New mixed rare-earth copper oxochalcogenides with a LaOAgS-type structure. Russ. J. Inorg. Chem. 44, 833 (1999).
K. Ueda and H. Hosono: Crystal structure of LaCuOS 1−xSex oxychalcogenides. Thin Solid Films 411, 115 (2002).
S. Inoue, K. Ueda, H. Hosono, and N. Hamada: Electronic structure of the transparent p-type semiconductor (LaO)CuS. Phys. Rev. B 64, 245211 (2001).
K. Ishikawa, S. Kinoshita, Y. Suzuki, S. Matsuura, T. Nakanishi, M. Aizawa, and Y. Suzuki: Preparation and electrical properties of (LaO)AgS and (LnO)CuS (Ln = La, Pr, or Nd). J. Electrochem. Soc. 138, 1166 (1991).
T. Ohtani, M. Hirose, T. Sato, K. Nagaoka, and M. Iwabe: Synthesis and some physical properties of new series of layered selenides (LnO)CuSe (Ln = Lanthanides). Jpn. J. Appl. Phys. 32 (Suppl. 32-3), 316 (1993).
Y. Takano, K. Yahagi, and K. Sekizawa: The new conductive oxysulfides [(La1−xSrx)O]CuS containing a Cu-layer. Physica B 206 & 207, 764 (1995).
H. Hiramatsu, M. Orita, M. Hirano, K. Ueda, and H. Hosono: Electrical conductivity control in transparent p-type (LaO)CuS thin films prepared by rf sputtering. J. Appl. Phys. 91, 9177 (2002).
H. Hiramatsu, K. Ueda, H. Ohta, M. Orita, M. Hirano, and H. Hosono: Preparation of transparent p-type (La1−xSrxO)CuS thin films by r.f. sputtering technique. Thin Solid Films 411, 125 (2002).
K. Takase, M. Koyano, T. Shimizu, K. Makihara, Y. Takahashi, Y. Takano, and K. Sekizawa: Electrical resistivity and photoluminescence spectrum of layered oxysulfide (LaO)CuS. Solid State Commun. 123, 531 (2002).
H. Yanagi, S. Park, A.D. Draeseke, D.A. Keszler, and J. Tate: P-type conductivity in transparent oxides and sulfide fluorides. J. Solid State Chem. 175, 34 (2003).
H. Yanagi, J. Tate, S. Park, C-H. Park, and D.A. Keszler: p-Type conductivity in wide-band-gap BaCuQF (Q = S, Se). Appl. Phys. Lett. 82, 2814 (2003).
H. Ohta, K. Nomura, M. Orita, M. Hirano, K. Ueda, T. Suzuki, Y. Ikuhara, and H. Hosono: Single-crystalline films of the homologous series InGaO3(ZnO)m grown by reactive solid-phase epitaxy. Adv. Funct. Mater. 13, 139 (2003).
K. Nomura, H. Ohta, K. Ueda, M. Orita, M. Hirano, and H. Hosono: Novel film growth technique of single crystalline In2O3(ZnO)m (m = integer) homologous compound. Thin Solid Films 411, 147 (2002).
H. Hiramatsu, K. Ueda, H. Ohta, M. Orita, M. Hirano, and H. Hosono: Heteroepitaxial growth of a wide-gap p-type semiconductor, LaCuOS. Appl. Phys. Lett. 81, 598 (2002).
H. Hiramatsu, H. Ohta, T. Suzuki, C. Honjo, Y. Ikuhara, K. Ueda, T. Kamiya, M. Hirano, and H. Hosono: Mechanism for heteroepitaxial growth of transparent p-type semiconductor: LaCuOS by reactive solid-phase epitaxy. Cryst. Growth Des. 4, 301 (2004).
K. Ueda, K. Takafuji, and H. Hosono: Preparation and crystal structure analysis of CeCuOS. J. Solid State Chem. 170, 182 (2003).
H. Hiramatsu, K. Ueda, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Degenerate p-type conductivity in wide-gap LaCuOS1−xSex (x = 0−1) epitaxial films. Appl. Phys. Lett. 82, 1048 (2003).
H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Intrinsic excitonic photoluminescence and band-gap engineering of wide-gap p-type oxychalcogenide epitaxial films of LnCuOCh (Ln = La, Pr, and Nd; Ch = S or Se) semiconductor alloys. J. Appl. Phys. 94, 5805 (2003).
H. Hiramatsu, K. Ueda, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Wide gap p-type degenerate semiconductor: Mgdoped LaCuOSe. Thin Solid Films 445, 304 (2003).
H. Kamioka, H. Hiramatsu, H. Ohta, M. Hirano, K. Ueda, T. Kamiya, and H. Hosono: Third-order optical nonlinearity originating from room-temperature exciton in layered compounds LaCuOS and LaCuOSe. Appl. Phys. Lett. 84, 879 (2004).
K. Ueda, H. Hiramatsu, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Single-atomic-layered quantum wells built in widegap semiconductors LnCuOCh (Ln = lanthanide, Ch = chalcogen). Phys. Rev. B 69, 155305 (2004).
H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Degenerate electrical conductive and excitonic photoluminescence properties of epitaxial films of wide gap p-type layered oxychalcogenides, LnCuOCh (Ln = La, Pr and Nd; Ch = S or Se). Appl. Phys. A (in press).
H. Hiramatsu, H. Ohta, M. Hirano, and H. Hosono: Heteroepitaxial growth of single-phase zinc blende ZnS films on transparent substrates by pulsed laser deposition under H2S atmosphere. Solid State Commun. 124, 411 (2002).
K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Orita, M. Hirano, T. Suzuki, C. Honjo, Y. Ikuhara, and H. Hosono: Growth mechanism for single-crystalline thin film of InGaO3(ZnO)5 by reactive solid-phase epitaxy. J. Appl. Phys. 95, 5532 (2004).
H. Ohta, H. Mizoguchi, M. Hirano, S. Narushima, T. Kamiya, and H. Hosono: Fabrication and characterization of heteroepitaxial p-n junction diode composed of wide-gap oxide semiconductors p-ZnRh2O4/n-ZnO. Appl. Phys. Lett. 82, 823 (2003).
R.D. Shannon: Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides. Acta Crystallogr. A 32, 751 (1976).
H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono: Heteroepitaxial growth of wide gap p-type semiconductors: LnCuOCh (Ln = La, Pr and Nd; Ch = S or Se) by reactive solid-phase epitaxy. Appl. Phys. A (in press).
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Hiramatsu, H., Ueda, K., Takafuji, K. et al. Fabrication of heteroepitaxial thin films of layered oxychalcogenides LnCuOCh (Ln = La–Nd; Ch = S–Te) by reactive solid-phase epitaxy. Journal of Materials Research 19, 2137–2143 (2004). https://doi.org/10.1557/JMR.2004.0273
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DOI: https://doi.org/10.1557/JMR.2004.0273