Abstract
Space resolved, on-line spontaneous and stimulated emission, and CARS diagnostics have been employed on CH4/H2 mixtures excited by rf-discharge in order to investigate the chemical processes and the gas phase kinetics in the plasma. CH4 and H2 concentration and temperature have been monitored during the process as a function of main reaction parameters (rf-power, total pressure, CH4/H2 ratio). Formation of CH,H2, and H in excited states has been observed. On the basis of present spectroscopic data, a model for the gas-phase reactions accompanying the carbon film deposition is proposed.
Similar content being viewed by others
References
A. Bubenzer, B. Dischler, G. Brand, and P. Koild, J. Appl. Phys. 54, 4590 (1983).
P. Couderc and Y. Catherine, Thin Solid Films 146, 93 (1987).
K. Kobayashi, N. Mutsukura, and Y. Machi, J. Appl. Phys. 59, 910 (1986).
A. B. Harker and J.F. DeNatale, J. Mater. Res. 5, 818 (1990).
R. A. Gottscho and T. A. Miller, Pure & Appl. Chem. 56, 189 (1984); J. Wolfrum, Appl. Phys. B46, 221 (1988).
S. A. J. Druet and J. P. Taran, Prog. Quantum Electron. 7,1 (1981).
B. Attal, D. Debarre, K. Muller-Dethlefs, and J. P. E. Taran, Rev. Phys. Appl. 18, 39 (1983); K. P. Gross, D. M. Gunthals, and J. W. Nibler, J. Chem. Phys. 70, 4673 (1979).
B. Attal-Tretout, P. Bouchardy, P. Magre, M. Péalat, and J. P. Taran, Appl. Phys. B51, 17 (1990).
R. Engeln, R. Fantoni, and G. Schina, II Nuovo Cimento D 12, 209 (1990).
R. Fantoni, F. Bijnen, S. Piccirillo, and S. Enzo, Chem. Phys. 147, 389 (1990); R. Fantoni, F. Bijnen, N. Djuric, and S. Piccirillo, Laser Chem. 11, 13 (1990); Appl. Phys. B 52, 176 (1991).
R. Engeln and R. Fantoni, II Nuovo Cimento D 13, 1133 (1991).
A. Giardini-Guidoni, A. Morone, M. Snels, E. Desimoni, A. M. Salvi, R. Fantoni, W. C. M Berden, and M. Giorgi, Appl. Surf. Sci. 46, 321 (1990).
S. O. Hay, W. C. Roman, and M. B. Colket III, J. Mater. Res. 5, 2387 (1990).
V. Barbarossa, F. Galluzzi, S. Mercuri, R. Tomaciello, and G. Grillo, in New Diamond Science and Technology, edited by R. Messier, J.T. Glass, J.E. Butler, and R. Roy (Mater. Res. Soc. Int. Symp. Proc. NDST-2, Pittsburgh, PA, 1991).
P. Ho, R. J. Buss, and R. E. Loehman, J. Mater. Res. 4, 873 (1989).
R. Ch. Baas and C. I. M. Beenakker, Comp. Phys. Comm. 8, 236 (1974).
C. J. M. Beenakker, P. J. F. Verbeek, G. R. Mohlmann, and F. J. de Heer, Quant. Spectrosc. Radiat. Transfer 15, 333 (1975).
R. Fantoni, M. Giorgi, A.G.G. Moliterni, W.C.M. Berden, V. Lazic, F. Polla Mattiot, and O. Martini, "On-line gas-phase optical diagnostic in plasma CVD deposition of carbon film," int. rep. RT/INN/91 ENEA Frascati (in press).
A. Carrington and D. A. Ramsey, Physica Scripta 25, 272 (1982).
K. Tachibana, M. Nishida, H. Harima, and Y. Urano, J. Phys. D: Appl. Phys. 17, 1727 (1984).
M. Tsuji, K. Kobarai, H. Kouno, H. Obase, and Y. Nishimura, J. Chem. Phys. 94, 277 (1991).
J. A. Schiavone, D. E. Donahue, and R. S. Freund, J. Chem. Phys. 67, 759 (1977).
A. R. Welch and D. L. Judge, J. Chem. Phys. 57, 286 (1972).
T. Kokubo, F. Tochikubo, and T. Makabe, J. Phys. D: Appl. Phys. 22, 1281 (1989).
L. E. Kline, W. D. Partlow, and W. E. Bias, J. Appl. Phys. 65, 70 (1988).
G. H. Dieke, The Hydrogen Molecule Wavelength Tables (Cross-white, 1972).
H. Kojima, H. Toyoda, and H. Sugai, Appl. Phys. Lett. 55, 1292 (1989).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Fantoni, R., Giorgi, M., Moliterni, A.G.G. et al. On-line gas-phase optical diagnostics in plasma CVD deposition of carbon films. Journal of Materials Research 7, 1204–1214 (1992). https://doi.org/10.1557/JMR.1992.1204
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1992.1204