Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
- New Instrumentations and Techniques -
The Development of the Angle Resolved XPS Equipment at SPring-8 BL15XU
Hideki Yoshikawa, Yoshiteru Kita, Katsumi Watanabe, Akihiro Tanaka, Masahiro Kimura, Atsushi Nisawa, Vlaicu A. Mihai, Masaru Kitamura, Nobuhiro Yagi, Masato Okui, Masami Taguchi, Retsu Oiwa, Sei FUKUSHIMA
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2002 Volume 9 Issue 3 Pages 374-377

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Abstract

The 3rd generation synchrotron radiation (SR) facilities have been recently built and have given us high flux and wide-energy tunable X-ray. This characteristic is useful to obtain XPS spectra excited by the high energy X-ray, which reveals the deeper layers. In this work, we used the beamline of SPring-8 BL15XU which has an revolver type undulator and a double crystal tandem monochromator and the angle-resolved XPS machine where an energy resolution is good even if X-ray energy is high up to 4500eV. For multilayers of the magnetic tunnel junction device, XPS measurement using 3000eV X-ray led to evaluate the deeper layers of a specimen and revealed the interface between Al oxide and Fe50Co50 alloy with Ta oxide or carbon protective overlayers.

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© 2002 by The Surface Analysis Society of Japan
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