The change of the surface compositions of oxides by electron beam irradiation during Auger electron spectroscopy (AES) measurement was studied. The surface compositions of the oxides were much affected by the irradiation of an electron beam. By the irradiation of an electron beam, the oxides were dissociated and the metallic components were enriched on the surfaces. The main factor affecting the change of surface compositions was found to be the electron beam current density. The effect of the electron beam current density on the dissociation velocity were studied and the conditions to minimize the dissociation of the ceramic oxides during AES measurment were proposed.