The 14th International Symposium on Atomic Level Characterization for New Materials and Devices ’22 (ALC’22) was held at Bankoku Shinryokan in Okinawa, Japan, from October 16 (Sun.) to 21 (Fri.), 2022, under the organization of the Division of Microbeam Analysis (MBA), the Japan Society of Vacuum and Surface Science (JVSS). In this symposium, there were 283 participants from 21 countries, and a total of 232 papers, including two Plenaries, two Tutorials, three MBA Award lectures, and a Sakaki Award lecture, were presented in a wide range of research fields related to atomic level characterization. Nine papers out of them are collected in this special issue.