Abstract
A highly sensitive temperature sensor is demonstrated experimentally, which is fabricated based on a Fabry–Perot interferometer (FPI) filled with polydimethylsiloxane (PDMS). The sensor’s sensitivity is by utilizing the thermal expansion effect of PDMS, which has been greatly improved compared to that of the traditional FPI temperature sensor. Moreover, in order to further improve the sensitivity, a scheme where two parallel FPI structures are used to form the Vernier effect is proposed, which are a sensing FPI and reference FPI, respectively. Such a temperature sensor based on the FPI filled with PDMS and the Vernier effect exhibits a high temperature sensitivity of 17.758 nm/°C. Meanwhile, the proposed sensors show the advantages of high sensitivity, simplicity, and low cost.
© 2019 Optical Society of America
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