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Conferences > OIC > 2001 > MB > MB3

Deposition of conductive NIR cut-off filters by rf magnetron sputtering

J. H. Lee, K. L. Yoo, S. H. Lee, Y. B. Son, and C. K. Hwangbo

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Abstract

A conductive NIR cut-off filter by repeating a basic [TiO2|Ti|Ag|TiO2] design has been deposited on glass by the rf magnetron sputtering method and the optical and electrical properties of single layers and four-periods filter were investigated.

© 2001 Optical Society of America

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