Abstract
All-planar integration of a light source with coupling waveguide on a Si chip is achieved using high-Q, Er doped silicon-rich silicon nitride (SRSN) microdisks and SU-8 waveguide. As-fabricated microdisks show Q-factors of 1–1.5×104 for both TE- and TM-like modes. Upon integration with single-mode SU-8 waveguide and clad with a polymer layer, Q-factor decreases to 5,000 for the TE-like mode, and 1,000 for TM-like mode. We obtain sharp Er3+ WGM emission coupled into the waveguide when the disk is pumped 1470 nm LD, indicating the promise of SRN:Er for compact, integrated Si- based light source.
© 2009 Optical Society of America
PDF ArticleMore Like This
Jee Soo Chang, Shinyoung Lee, Jung H. Shin, Jae-Heon Shin, and Gun Yong Sung
WE1_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007
Debo Olaosebikan, Alexander Gondarenko, Kyle Preston, Michal Lipson, Selcuk Yerci, Rui Li, and Luca Dal Negro
CTuN4 Conference on Lasers and Electro-Optics (CLEO:S&I) 2009
Yuntao Li, Xi Xiao, Qingzhong Huang, Zhiyong Li, Yude Yu, and Jinzhong Yu
TUP2_9 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2009