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Mechanical Science and Technology for Aerospace Engineering. 2022, (10) Core

Study on PZT Excitation Device with Self-adaptive Base StructureChinese Full TextEnglish Full Text (MT)

SHE Dongsheng;HONG Yiping;CHEN Ya′nan;TIAN Jiangping;College of Control Science and Engineering, Bohai University;School of Energy and Power Engineering, Dalian University of Technology;

Abstract: The realization method of the moveable base structure and the issue of the installation reliability for microstructures were studied. A point-contacted movable base structure composed of an upper connecting block, a steel ball and a lower connecting block was designed. An elastic support with L-shaped supporting arms was also designed. The base excitation device with PZT was fabricated. The dynamic measurement system for MEMS microstructures was developed. The excitation performance of the excitation device was tested. The dynamic characteristics of three typical microcantilevers were also tested. The results show that the base structure of the designed excitation device can be adaptively adjusted, and the deformation of the installation area for microstructures is greatly reduced. The excitation bandwidth of the excitation device can reach to 90 kHz. The excitation device has a good excitation performance.
Keywords：

excitation device; movable base structure; dynamic characteristic measurement; piezoelectric ceramics;

  • DOI：

    10.13433/j.cnki.1003-8728.20200483

  • Series：

    (C) Architecture/ Energy/ Traffic/ Electromechanics, etc

  • Subject：

    Mechanics Industry

  • Classification Code：

    TH122

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