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 | CO2 Sensing Properties of La-loaded SnO2 Thin Films Prepared by Sputtering
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| | Hiroshi Sakama1), Shinji Saeki1), Atsushi Ono1), Noriya Ichikawa1), Atsushi Tanokura1), Hiroshi Uetsuka2) and Hiroshi Onishi2) |
| 1) Department of Physics, Sophia University
2) Surface Chemistry Laboratory, Kanagawa Academy of Science and Technology |
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The detection sensitivities of La-loaded SnO2 films prepared using reactive RF magnetron sputtering to CO2 were measured at various temperatures. The maximum sensitivity was attained at 200 °C for a film loaded with 5 atom % La. Pure SnO2 films revealed good crystallinity of the rutile phase. The crystallization of SnO2 films was suppressed by La loading. |
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| doi:10.1246/cl.2004.1080 | | JOI JST.JSTAGE/cl/2004.1080 |
| Copyright (c) 2004 The Chemical Society of Japan |
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