Thin Thermal Oxide on Silicon

© 1984 ECS - The Electrochemical Society
, , Citation E. A. Taft 1984 J. Electrochem. Soc. 131 2460 DOI 10.1149/1.2115321

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1 General Electric Company, Corporate Research and Development, Schenectady, New York 12301

Dates

  1. Received 9 July 1984

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