Metalorganic Vapor Phase Epitaxy Growth of High Quality Cubic GaN on GaAs (100) Substrates

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Copyright (c) 1998 The Japan Society of Applied Physics
, , Citation Jun Wu et al 1998 Jpn. J. Appl. Phys. 37 1440 DOI 10.1143/JJAP.37.1440

1347-4065/37/3S/1440

Abstract

We report on the growth of high quality cubic GaN films on GaAs (100) substrates by low pressure metalorganic vapor phase epitaxy. The GaN films exhibit a smooth surface which is free from cracks. X-ray diffraction shows the cubic nature of the GaN films. X-ray rocking curve with ω scan shows that the crystal quality of GaN films improves markedly with increasing growth temperatures. Photoluminescence measurements confirm the high quality of the cubic GaN films. The full width at half maximum of excitonic emission from the cubic GaN films is as narrow as 70 meV at 300 K.

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10.1143/JJAP.37.1440