Abstract
Antigen sensors using carbon nanotube field effect transistors (CNT-FETs) were fabricated. In order to avoid the problem of exposing source and drain electrodes directly to the phosphate buffered saline (PBS) solution, source and drain electrodes were covered with evaporated SiO film. The immobilization of antibodies on the device surface was confirmed by the observation of fluorescence. Drain current in the sensor device was decreased by the antibody–antigen binding, which suggests a potential use of CNT-FETs as antigen sensors.