Abstract
An Ag-alloy (97Ag–1Pd–2Cu in mol%) was proposed as a new top-electrode for Pb(Zr, Ti)O3 (PZT) films. The effect of annealing temperature on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode.