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Fabrication and Microwave Responses of YBa2Cu3O7-x Superconducting Thin-Film Nanobridges

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Copyright (c) 1995 The Japan Society of Applied Physics
, , Citation Wu Lu et al 1995 Jpn. J. Appl. Phys. 34 L1644 DOI 10.1143/JJAP.34.L1644

1347-4065/34/12B/L1644

Abstract

Superconducting nanobridges with a width smaller than 150 nm were patterned by electron beam/ultraviolet (EB/UV) hybrid exposure technique in YBa2Cu3O7-x (YBCO) thin films. There was no significant decrease in transition temperature and critical current density compared with unstructured films. For a 120-nm-wide nanobridge, as high as 150 µA critical current was obtained at 77 K.

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10.1143/JJAP.34.L1644