Abstract
Superconducting nanobridges with a width smaller than 150 nm were patterned by electron beam/ultraviolet (EB/UV) hybrid exposure technique in YBa2Cu3O7-x (YBCO) thin films. There was no significant decrease in transition temperature and critical current density compared with unstructured films. For a 120-nm-wide nanobridge, as high as 150 µA critical current was obtained at 77 K.
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