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Excimer Emission from Pulsed Tandem Microhollow Cathode Discharges in Xenon

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Published 10 May 2012 ©2012 The Japan Society of Applied Physics
, , Citation Byung-Joon Lee et al 2012 Appl. Phys. Express 5 056001 DOI 10.1143/APEX.5.056001

1882-0786/5/5/056001

Abstract

This paper describes an extension of a basic single microhollow cathode discharge (MHCD) to a tandem MHCD, i.e., two discharges in series from an anode–cathode–anode configuration. When a high-voltage pulse is superimposed with a direct current (DC) tandem MHCD, an intense excimer emission along the discharge axis in a high pressure xenon gas is generated which is two orders of magnitude higher than that of the DC tandem MHCD. In addition, the emission intensity increases to almost twice by increasing cathode thickness from 250 to 1000 µm. The emission is further enhanced by increasing the gas pressure from 400 to 800 mbar.

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