Abstract
Diamond structures with inverse and direct three-dimensional opal lattices with period of 250–530 nm were grown by microwave plasma deposition in methane-hydrogen mixtures using porous SiO2 opal matrix and its Si replica as templates, respectively. The Si templates can be filled with diamond to the depth as large as 80 layers of the spheres.
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Published in Russian in Fizika Tverdogo Tela, 2011, Vol. 53, No. 6, pp. 1069–1071.
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Ralchenko, V.G., Sovyk, D.N., Bolshakov, A.P. et al. Diamond direct and inverse opal matrices produced by chemical vapor deposition. Phys. Solid State 53, 1131–1134 (2011). https://doi.org/10.1134/S106378341106028X
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DOI: https://doi.org/10.1134/S106378341106028X