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Atom probe mass spectrometry

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Abstract

A brief review of the stages of the evolution and the current status of atom-probe techniques with a special emphasis on 3D tomography with laser-assisted field evaporation is provided. The sample preparation is discussed; the results of the investigation of metals, alloys, semiconductor structures and dielectric layers, and organic materials are presented. Because of the high spatial resolution (0.1–0.3 nm in all three directions) and excellent compositional sensitivity (better than 10−3 at %), atom probes hold much promise in nanotechnology.

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Authors and Affiliations

  1. Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia (FCT), Universidade Nova de Lisboa, 2829-516, Caparica, Portugal

    A. B. Tolstoguzov

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Correspondence to A. B. Tolstoguzov.

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Original Russian Text © A.B. Tolstoguzov, 2010, published in Mass-spektrometria, 2010, 6(4), pp. 280–288.

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Tolstoguzov, A.B. Atom probe mass spectrometry. J Anal Chem 65, 1311–1319 (2010). https://doi.org/10.1134/S1061934810130022

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