Abstract
In contrast to traditional methods for obtaining planar superconducting structures based on YBCO films, in which the topology is formed by etching or ion implantation, the topology in the master mask (MM) method is set at the initial stage of structure preparation, during the MM formation, and the YBCO deposition is the final stage. The superconducting elements of the structure are formed in MM windows, and insulating regions appear between them. Having fixed the topology of superconducting bridges at the MM formation stage, we measured their characteristics depending on the YBCO film thickness, performing deposition cycles sequentially. After each YBCO deposition cycle, we measured the structure parameters of the film as well as the critical temperature and current in the bridges, including the bridges with the Josephson junctions formed on a bicrystal substrate.
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Funding
This study was supported by state order no. 0035-2019-0024-S-01 for the Institute of the Microstructure Physics, Russian Academy of Sciences, and performed on the equipment of the Physics and Technology of Micro- and Nanostructures Center for Collective Use of the institute.
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Translated by N. Wadhwa
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Masterov, D.V., Pavlov, S.A., Parafin, A.E. et al. Possibilities of the Master Mask Method in Analysis of Characteristics of Planar HTSC Structures Depending on Superconducting Film Thickness. Tech. Phys. 65, 1605–1608 (2020). https://doi.org/10.1134/S106378422010014X
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DOI: https://doi.org/10.1134/S106378422010014X