Skip to main content
Log in

Possibilities of the Master Mask Method in Analysis of Characteristics of Planar HTSC Structures Depending on Superconducting Film Thickness

  • SOLID STATE
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

In contrast to traditional methods for obtaining planar superconducting structures based on YBCO films, in which the topology is formed by etching or ion implantation, the topology in the master mask (MM) method is set at the initial stage of structure preparation, during the MM formation, and the YBCO deposition is the final stage. The superconducting elements of the structure are formed in MM windows, and insulating regions appear between them. Having fixed the topology of superconducting bridges at the MM formation stage, we measured their characteristics depending on the YBCO film thickness, performing deposition cycles sequentially. After each YBCO deposition cycle, we measured the structure parameters of the film as well as the critical temperature and current in the bridges, including the bridges with the Josephson junctions formed on a bicrystal substrate.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.

Similar content being viewed by others

REFERENCES

  1. M. Malnou, C. Feuillet-Palma, C. Ulysse, G. Faini, P. Febvre, M. Sirena, L. Olanier, J. Lesueur, and N. Bergeal, J. Appl. Phys. 116 (7), 074505 (2014). https://doi.org/10.1063/1.4892940

    Article  ADS  Google Scholar 

  2. J. D. Pedarnig, M. A. Bodea, B. Steiger, W. Markowitsch, and W. Lang, Phys. Procedia 36, 508 (2012). https://doi.org/10.1016/j.phpro.2012.06.075

    Article  ADS  Google Scholar 

  3. D. V. Masterov, S. A. Pavlov, A. E. Parafin, L. S. Revin, and A. L. Pankratov, RF Patent No. 188983 (2019). http://www1.fips.ru/registers-doc-view/fips_servlet?DB=RUPM&DocNumber=188983&TypeFile=html.

  4. D. V. Masterov, S. A. Pavlov, A. E. Parafin, E. V. Skorokhodov, and P. A. Yunin, Phys. Solid State 60 (11), 2139 (2018). https://doi.org/10.1134/S1063783418110215

    Article  ADS  Google Scholar 

  5. Yu. N. Drozdov, D. V. Masterov, S. A. Pavlov, A. E. Parafin, and P. A. Yunin, Tech. Phys. 60 (11), 1682 (2015). https://doi.org/10.1134/S1063784215110080

    Article  Google Scholar 

  6. H. Hilgenkamp and J. Mannhart, Rev. Mod. Phys. 74 (2), 485 (2002). https://doi.org/10.1103/RevModPhys.74.485

    Article  ADS  Google Scholar 

  7. Z. G. Ivanov, P. A. Nilsson, D. Winkler, J. A. Alarco, T. Claeson, E. A. Stepantsov, and A. Ya. Tzalenchuk, Appl. Phys. Lett. 59, 3030 (1991). https://doi.org/10.1063/1.105783

    Article  ADS  Google Scholar 

Download references

Funding

This study was supported by state order no. 0035-2019-0024-S-01 for the Institute of the Microstructure Physics, Russian Academy of Sciences, and performed on the equipment of the Physics and Technology of Micro- and Nanostructures Center for Collective Use of the institute.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to D. V. Masterov.

Ethics declarations

The authors declare that they have no conflicts of interest.

Additional information

Translated by N. Wadhwa

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Masterov, D.V., Pavlov, S.A., Parafin, A.E. et al. Possibilities of the Master Mask Method in Analysis of Characteristics of Planar HTSC Structures Depending on Superconducting Film Thickness. Tech. Phys. 65, 1605–1608 (2020). https://doi.org/10.1134/S106378422010014X

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S106378422010014X

Navigation