Abstract
Nanosized films of stabilized zirconia with Au nanoparticles formed by implanting Au ions are studied by X-ray photoelectron spectroscopy and transmission electron microscopy. The effect of irradiation of films with Au ions and postimplantation annealing on the distribution of chemical elements and zirconium- containing ZrO x compounds over the depth of the films is studied. Based on the data on the dimensional shift of the Au 4 f photoelectron line, the average value of the nanoparticle size is determined.
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Original Russian Text © S.Yu. Zubkov, I.N. Antonov, O.N. Gorshkov, A.P. Kasatkin, R.N. Kryukov, D.E. Nikolichev, D.A. Pavlov, M.E. Shenina, 2018, published in Fizika Tverdogo Tela, 2018, Vol. 60, No. 3, pp. 591–595.
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Zubkov, S.Y., Antonov, I.N., Gorshkov, O.N. et al. X-Ray Photoelectron Spectroscopy of Stabilized Zirconia Films with Embedded Au Nanoparticles Formed under Irradiation with Gold Ions. Phys. Solid State 60, 598–602 (2018). https://doi.org/10.1134/S1063783418030368
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DOI: https://doi.org/10.1134/S1063783418030368