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Influence of substrate temperature on structural and optical properties of RF sputtered ZnMnO thin films

  • Surfaces, Interfaces, and Thin Films
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Abstract

The ZnMnO thin films were deposited on glass substrates by radio frequency magnetron sputtering method. The properties of ZnMnO thin films were investigated by high-resolution x-ray diffractometer (HRXRD),atomic force microscopy (AFM), UV-Vis spectrometer and room temperature photoluminescence (PL), under the influence of substrate temperature. The substrate temperature was varied from 300, 400 and 500°C. With increasing the substrate temperature, the structure of the films changed from cubic to hexagonal. The cubic ZnMnO thin films grown along [210] direction, while the hexagonal ones grown along [002] direction. The changes in surface morphology provided a proof on the structural transition. Also, decrease and increase of optical band gap is associated with cubic or hexagonal structure of the films.

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Authors and Affiliations

  1. Photonics Application and Research Center, Gazi University, 06500, Ankara, Turkey

    Parisa Pashaei, Nihan Akin, U. Ceren Baskose, M. Kemal Ozturk, Mehmet Cakmak & Suleyman Ozcelik

  2. Department of Physics, Gazi University, 06500, Ankara, Turkey

    Parisa Pashaei, Nihan Akin, U. Ceren Baskose, M. Kemal Ozturk, Mehmet Cakmak & Suleyman Ozcelik

Authors
  1. Parisa Pashaei
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  2. Nihan Akin
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  3. U. Ceren Baskose
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  4. M. Kemal Ozturk
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  5. Mehmet Cakmak
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  6. Suleyman Ozcelik
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Correspondence to Nihan Akin or Suleyman Ozcelik.

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Pashaei, P., Akin, N., Ceren Baskose, U. et al. Influence of substrate temperature on structural and optical properties of RF sputtered ZnMnO thin films. Semiconductors 49, 780–784 (2015). https://doi.org/10.1134/S1063782615060184

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  • DOI: https://doi.org/10.1134/S1063782615060184

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