Skip to main content
Log in

Characterization of porous silicon carbide according to absorption and photoluminescence spectra

  • Spectroscopy, Interaction with Radiation
  • Published:
Semiconductors Aims and scope Submit manuscript

Abstract

The results of the atomic-force microscopy, optical-absorption spectroscopy, and photoluminescence spectroscopy of porous silicon carbide (por-SiC) produced by anodic etching are reported. Analysis of the data shows that the cubic SiC phase is lacking in the porous layer and the photoluminescence signal from por-SiC at the excitation photon energy hνexE g appears due to the formation of radiative centers associated with impurity atoms and surface defects produced upon anodic etching of the sample and subsequent treatment to uncover the pores.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Porous Silicon Carbide and Gallium Nitride: Epitaxy, Catalysis, and Biotechnology Applications, Ed. by R. M. Feenstra and E. C. Colin (Wood, 2008).

    Google Scholar 

  2. S. N. Savkina, V. V. Ratnikov, A. Yu. Rogachov, V. B. Shuman, A. S. Tregubova, and A. A. Volkova, Semiconductors 36, 758 (2002).

    Article  ADS  Google Scholar 

  3. M. G. Mynbaeva, A. A. Lavrent’ev, N. I. Kuznetsov, A. N. Kuznetsov, K. D. Mynbaev, and A. A. Lebedev, Semiconductors 37, 594 (2003).

    Article  ADS  Google Scholar 

  4. L. M. Sorokin, N. S. Savkina, V. B. Shuman, A. A. Lebedev, G. N. Mosina, and G. Hutchison, Tech. Phys. Lett. 28, 935 (2002).

    Article  ADS  Google Scholar 

  5. G. Polupan and T. V. Torchynska, Thin Solid Films 518, S208 (2010).

    Article  ADS  Google Scholar 

  6. T. V. Torchynska, A. Diaz Cano, M. Dybic, S. Ostapenko, and M. Mynbaeva, Physica B 376–377, 367 (2006).

    Article  Google Scholar 

  7. D. A. Sechenov, O. A. Ageev, F. D. Kasimov, and G. G. Kadymov, Gas Sensitive Sensors Based on Silicon Carbide (Baku, Mutardzhim, 2004) [in Russian].

    Google Scholar 

  8. T. L. Rittenhouse, P. W. Bohn, T. K. Hossain, I. Adesida, J. Lindesay, and A. Marcus, J. Appl. Phys. 95, 490 (2004).

    Article  ADS  Google Scholar 

  9. F. Hassen, R. M’Ghaieth, H. Maaref, and R. Madar, Mater. Sci. Eng. C 15, 113 (2001).

    Article  Google Scholar 

  10. Ki-Hwan Lee, Ying-Lei Du, and Tae-Ho Lee, Bull. Korean Chem. Soc. 21, 769 (2000).

    Google Scholar 

  11. A. M. Danishevskii, M. V. Zamoryanskaya, A. A. Sitnikova, V. B. Shuman, and A. A. Suvorova, Semicond. Sci. Technol. 13, 1111 (1998).

    Article  ADS  Google Scholar 

  12. Yu. Yu. Bacherikov, R. V. Konakova, O. S. Litvin, O. B. Okhrimenko, A. M. Svetlichnyi, and N. N. Moskovchenko, Tech. Phys. Lett. 32, 140 (2006).

    Article  ADS  Google Scholar 

  13. R. V. Konakova, A. F. Kolomys, O. S. Litvin, O. B. Okhrimenko, V. V. Strel’chuk, A. V. Svetlichnyi, and L. G. Linets, Semiconductors 46, 1221 (2012).

    Article  ADS  Google Scholar 

  14. SiC Materials and Devices, Selected Topics in Electronics and Systems, Ed. by M. Shur, S. Rumyantsev, and M. Levinshtein (World Scientific, Singapore, 2006), vol. 1.

    Google Scholar 

  15. A. M. Danishevskii, V. B. Shuman, A. Yu. Rogachev, E. G. Guk, P. A. Ivanov, and A. A. Mal’tsev, Semiconductors 30, 564 (1996).

    ADS  Google Scholar 

  16. T. Matsumoto, J. Takahashi, T. Tamaki, T. Futagi, H. Mimura, and Y. Kanemitsu, Appl. Phys. Lett. 64, 226 (1994).

    Article  ADS  Google Scholar 

  17. A. M. Danishevskii, V. B. Shuman, A. Yu. Rogachev, and P. A. Ivanov, Semiconductors 29, 1106 (1995).

    ADS  Google Scholar 

  18. A. M. Rossi, V. Ballarini, S. Ferrero, and F. Giorgis, Mater. Sci. Forum 457–460, 1475 (2004).

    Article  Google Scholar 

  19. Yu. Goldberg, M. E. Levinshtein, and S. L. Rumyantsev, in Properties of Advanced SemiconductorMaterials GaN, AlN, SiC, BN, SiC, SiGe, Ed. by M. E. Levinshtein, S. L. Rumyantsev, and M. S. Shur (Wiley, New York, 2001), p. 93.

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to O. B. Okhrimenko.

Additional information

Original Russian Text © N.I. Berezovska, Yu.Yu. Bacherikov, R.V. Konakova, O.B. Okhrimenko, O.S. Lytvyn, L.G. Linets, A.M. Svetlichnyi, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 8, pp. 1055–1058.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Berezovska, N.I., Bacherikov, Y.Y., Konakova, R.V. et al. Characterization of porous silicon carbide according to absorption and photoluminescence spectra. Semiconductors 48, 1028–1030 (2014). https://doi.org/10.1134/S1063782614080041

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063782614080041

Keywords

Navigation