Abstract
Silicon-nanocluster formation upon the annealing of SiO x (1 ≤ x < 2) layers is studied with the use of the lattice Monte Carlo model. The simulation is performed taking into account an additional mechanism of silicon transport due to the diffusion of silicon-monoxide (SiO) particles. It is demonstrated that the presence of SiO in the system leads to the growth of a critical silicon-nanocluster nucleus and can increase the nanocluster growth rate. Silicon-nanocluster formation upon the annealing of SiO x layers occurs only for the composition with x < 1.8. Upon the annealing of SiO x layers on a silicon substrate, a region depleted of silicon nanoclusters is observed in the layer adjacent to the substrate, which allows the formation of silicon nanoclusters in the SiO2 matrix at a certain distance from the Si/SiO2 interface.
Similar content being viewed by others
References
L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, and F. Priolo, Nature 408, 440 (2000).
Device Applications of Silicon Nanocrystals and Nanostructures, Ed. by N. Koshida (Springer, 2009).
Silicon Nanocrystals: Fundamentals, Synthesis and Applications, Ed. by L. Pavesi and R. Turan (Wiley-VCH, 2010).
L. Khriachtchev, M. Rasanen, S. Novikov, and J. Sinkkonen, Appl. Phys. Lett. 79, 1249 (2001).
C. Y. Ng, T. P. Chen, M. S. Tse, V. S. W. Lim, S. Fung, and A. A. Tseng, Appl. Phys. Lett. 86, 152110 (2005).
S. D. Sarma, R. de Sousa, X. Hu, and B. Koiller, Solid State Commun. 133, 737 (2005).
V. Beyer, J. von Borany, and K.-H. Heinig, J. Appl. Phys. 101, 053516 (2007).
G. A. Kachurin, S. G. Yanovskaya, M.-O. Ruault, A. K. Gutakovskii, K. S. Zhuravlev, O. Kaitasov, and H. Bernas, Semiconductors 34, 965 (2000).
S. Cheylan, R. G. Elliman, K. Gaff, and A. Durandet, Appl. Phys. Lett. 78, 1670 (2001).
N. Daldosso, G. Das, S. Larcheri, G. Mariotto, G. Dalba, L. Pavesi, A. Irrera, F. Priolo, F. Iacona, and F. Rocca, J. Appl. Phys. 101, 113510 (2007).
A. N. Karpov, D. V. Marin, V. A. Volodin, J. Jedrzejewski, G. A. Kachurin, E. Savir, N. L. Shvarts, Z. Sh. Yanovitskaya, I. Balberg, and Y. Goldstein, Semiconductors 42, 731 (2008).
J. Wang, X. F. Wang, Q. Li, A. Hryciw, and A. Meldrum, Philos. Mag. 87, 11 (2007).
D. Comedi, O. H. Y. Zalloum, E. A. Irving, J. Wojcik, T. Roschuk, M. J. Flynn, and P. Mascher, J. Appl. Phys. 99, 023518 (2006).
F. Iacona, G. Franzo, and C. Spinella, J. Appl. Phys. 87, 1295 (2000).
L. A. Nesbit, Appl. Phys. Lett. 46, 38 (1985).
D. Tsoukalas, C. Tsamis, and P. Normand, J. Appl. Phys. 89, 7809 (2001).
S. Fukatsu, T. Takahashi, K. M. Itoh, M. Uematsu, A. Fujiwara, H. Kageshima, Y. Takahashi, K. Shiraishi, and U. Gosele, Appl. Phys. Lett. 83, 3897 (2003).
T. Takahashi, S. Fukatsu, K. M. Itoh, M. Uematsu, A. Fujiwara, H. Kageshima, Y. Takahashi, and K. Shiraishi, J. Appl. Phys. 93, 3674 (2003).
K. Furukawa Y. Liu, H. Nakashima, D. Gao, K. Uchino, K. Muraoka, and H. Tsusuki, Appl. Phys. Lett. 72, 725 (1998).
H. Kageshima and K. Shiraishi, Phys. Rev. Lett. 81, 5936 (1998).
T. A. Kirichenko, D. Yu, S. K. Banerjee, and G. S. Hwang, Phys. Rev. B 72, 035345 (2005).
A. Korkin, J. C. Greer, G. Bersuker, V. V. Karasiev, and R. J. Bartlett, Phys. Rev. B 73, 165312 (2006).
A. Bongiorno and A. Pasquarello, Phys. Rev. Lett. 88, 125901 (2002).
R. Q. Zhang, M. W. Zhao, and S. T. Lee, Phys. Rev. Lett. 93, 095503 (2004).
T. Muller, K.-H. Heinig, and W. Moller, Mater. Sci. Eng. B 101, 49 (2003).
D. Yu, S. Lee, and G. S. Hwang, J. Appl. Phys. 102, 084309 (2007).
A. V. Zverev, I. G. Neizvestnyi, N. L. Shwartz, and Z. Sh. Yanovitskaya, Nanotechnol. Russia 3, 368 (2008).
E. A. Mikhant’ev, I. G. Neizvestnyi, S. V. Usenkov, and N. L. Shvarts, Avtometriya 47(5), 88 (2011).
A. V. Zverev, K. Yu. Zinchenko, N. L. Shwarts, and Z. Sh. Yanovitskaya, Nanotechnol. Russia 4, 215 (2009).
G. Ya. Krasnikov, N. A. Zaitsev, and I. V. Matyushkin, Semiconductors 37, 44 (2003).
V. M. Babich, N. I. Bletskan, and E. F. Venger, Oxygen in Silicon Single Crystals (Interpress LTD, Kiev, 1997) [in Russian].
D. Bahloul-Hourlier and P. Perrot, J. Phase Equilib. Diff. 28, 150 (2007).
F. T. Ferguson and J. A. Nuth III, J. Chem. Eng. Data 53, 2824 (2008).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © E.A. Mikhantiev, I.G. Neizvestny, S.V. Usenkov, N.L. Shwartz, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 7, pp. 917–925.
Rights and permissions
About this article
Cite this article
Mikhantiev, E.A., Neizvestny, I.G., Usenkov, S.V. et al. Monte Carlo simulation of the effect of silicon monoxide on silicon-nanocluster formation. Semiconductors 48, 891–898 (2014). https://doi.org/10.1134/S1063782614070136
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782614070136