Abstract
The experimental results concerning the elaboration of the technology used to manufacture thin film negative electrodes for lithium-ion batteries based on Si–O–Al–Zn composites have been presented. The regimes of sputtering and the possibilities of controlling the structure and phase composition of the films, the methods used for the diagnostics of the structure and phase composition of the films, and the results of the electrochemical tests of the negative electrodes have been described.
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22 July 2017
An erratum to this article has been published.
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Original Russian Text © A.A. Airapetov, S.V. Vasiliev, T.L. Kulova, M.E. Lebedev, A.V. Metlitskaya, A.A. Mironenko, N.F. Nikol’skaya, V.V. Odinokov, G.Ya. Pavlov, D.E. Pukhov, A.S. Rudyi, A.M. Skundin, V.A. Sologub, I.S. Fedorov, A.B. Churilov, 2016, published in Mikroelektronika, 2016, Vol. 45, No. 4, pp. 305–312.
An erratum to this article is available at https://doi.org/10.1134/S1063739717440019.
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Airapetov, A.A., Vasiliev, S.V., Kulova, T.L. et al. Thin film negative electrode based on silicon composite for lithium-ion batteries. Russ Microelectron 45, 285–291 (2016). https://doi.org/10.1134/S1063739716030021
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DOI: https://doi.org/10.1134/S1063739716030021