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Multilayer x-ray mirrors based on W/B 4 C with ultrashort (d = 0.7–1.5 nm) periods

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Abstract

A method using resonance diffuse x-ray scattering has been developed to investigate the properties of multilayer structures composed of ultrathin films. Multilayer structures W/B 4 C with ultra-short periods (d=0.7–1.5 nm) have been studied using specular and diffuse x-ray scattering. The contributions of the interface roughness and the mixing of the layer materials to the total width of the transition region between the layers have been separated for these structures. Quasi-Bragg peaks in the diffuse scattering spectra have been observed experimentally, and their analysis has shown that the interface roughnesses in multilayer W/B 4 C structures are correlated well.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, GSP-105, Nizhni Novgorod, 603950, Russia

    Yu. A. Vainer, E. B. Kluenkov, A. E. Pestov, K. A. Prokhorov, N. N. Salashchenko, A. A. Fraerman, V. V. Chernov & N. I. Chkhalo

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  1. Yu. A. Vainer
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  2. E. B. Kluenkov
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  3. A. E. Pestov
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  4. K. A. Prokhorov
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  5. N. N. Salashchenko
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  6. A. A. Fraerman
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  7. V. V. Chernov
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  8. N. I. Chkhalo
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Additional information

Original Russian Text © Yu.A. Vainer, E.B. Kluenkov, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, A.A. Fraerman, V.V. Chernov, N.I. Chkhalo, 2007, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 1, pp. 10–16.

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Vainer, Y.A., Kluenkov, E.B., Pestov, A.E. et al. Multilayer x-ray mirrors based on W/B 4 C with ultrashort (d = 0.7–1.5 nm) periods. J. Surf. Investig. 1, 7–12 (2007). https://doi.org/10.1134/S1027451007010028

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  • DOI: https://doi.org/10.1134/S1027451007010028

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