Abstract
The formation of single-layer and multilayer graphene by chemical vapor deposition has been studied experimentally. The structures of coatings formed at different temperatures and compositions of the gas mixture have been analyzed. Regimes for transferring graphene structures to various substrates have been developed. Transparent flexible conductive polyethylene terephthalate–ethylene vinyl acetate–graphene and polymethylmethacrylate–graphene composites have been obtained.
Similar content being viewed by others
REFERENCES
S. Suzuki, Y. Terada, and M. Yoshimura, “Suppression of Graphene Nucleation by Turning off Hydrogen Supply Just before Atmospheric Pressure Chemical Vapor Deposition Growth," Coatings7 (11), 1–12 (2017).
S. Dhingra, J.-F. Hsu, and I. Vlassiouk, “Chemical Vapor Deposition of Graphene on Large-Domain Ultra-Flat Copper," Carbon69, 188–193 (2014).
C. Zhang, R. Tu, and M. Dong, “Growth of Umbrella-Like Millimeter-Scale Single-Crystalline Graphene on Liquid Copper," Carbon 150, 356–362 (2019).
H. Sun, Y. Han, and J. Wu, “Cooling Growth of Millimeter-Size Single-Crystal Bilayer Graphene at Atmospheric Pressure," J. Phys. Chem. C 120 (25), 13596–13603 (2016).
J. W. Suk, A. Kitt, and C. W. Magnuson, “Transfer of CVD-Grown Monolayer Graphene onto Arbitrary Substrates," ACS Nano5 (9), 6916–6924 (2011).
X. Liang, B. A. Sperling, and I. Calizo, “Toward Clean and Crackless Transfer of Graphene," ACS Nano 5 (11), 9144–9153 (2011).
I. V. Antonova, S. V. Golod, and R. A. Soots, “Comparison of Various Methods for Transferring Graphene and Few Layer Graphene Grown by Chemical Vapor Deposition to an Insulating SiO2/Si Substrate," Semiconductors 48 (6), 804–808 (2014).
S. Xing, W. Wu, and Y. Wang, “Kinetic Study of Graphene Growth: Temperature Perspective on Growth Rate and Film Thickness by Chemical Vapor Deposition," Chem. Phys. Lett. 580, 62–66 (2013).
L. Colombo, X. Li, and B. Han, “Growth Kinetics and Defects of CVD Graphene on Cu," ECS Trans. 28 (5), 109–114 (2010).
H. Kim, C. Mattevi, and M. R. Calvo, “Activation Energy Paths for Graphene Nucleation and Growth on Cu," ACS Nano 6(4), 3614–3623 (2012).
I. A. Kostogrud, E. V. Boyko, and D. V. Smovzh, “Effect of Hydrogen Concentration on CVD Synthesis of Graphene," J. Phys. Conf. Ser.1382, 012157 (2019).
X. Xu, Z. Zhang, and J. Dong, “Ultrafast Epitaxial Growth of Metre-Sized Single-Crystal Graphene on Industrial Cu Foil," Sci. Bull. 62 (15), 1074–1080 (2017).
I. Vlassiouk, P. Fulvio, and H. Meyer, “Large Scale Atmospheric Pressure Chemical Vapor Deposition of Graphene," Carbon54, 58–67 (2013).
I. A. Kostogrud, E. V. Boyko, and D. V. Smovzh, “Formation of Graphene on the Surface of Copper under the Conditions of Chemical Deposition from the Gas Phase," J. Phys. Conf. Ser.1105, 012139 (2018).
I. A. Kostogrud, E. V. Boyko, and D. V. Smovzh, “The Main Sources of Graphene Damage at Transfer from Copper to PET/EVA Polymer," Mater. Chem. Phys. 219, 67–73 (2018).
D. V. Smovzh, I. A. Kostogrud, and E. V. Boyko, “Joule Heater Based on Single-Layer Graphene," Nanotechnology 31 (33), 1–8 (2020).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Smovzh, D.V., Kostogrud, I.A., Boyko, E.V. et al. SYNTHESIS OF GRAPHENE BY CHEMICAL VAPOR DEPOSITION AND ITS TRANSFER TO POLYMER. J Appl Mech Tech Phy 61, 888–897 (2020). https://doi.org/10.1134/S0021894420050247
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0021894420050247