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Synthesis of Zirconium Diboride Films and ZrB2/BC x N y Heterostructures

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Inorganic Materials Aims and scope

Abstract

Using mechanochemical synthesis, we have prepared zirconium borohydride, Zr(BH4)4, as a precursor for ZrB2 film growth by chemical vapor deposition. We have carried out the thermodynamic modeling of phase formation processes in the Zr–B–(N)–H and Zr–B–(N)–H–O systems in a wide temperature range, from 100 to 2500°C, at various p(H2)/p(Zr(BH4)4) and p(NH3)/p(Zr(BH4)4) partial pressure ratios in the starting gas mixtures. A process has been proposed for the growth of zirconium diboride films by Zr(BH4)4 decomposition using two techniques: chemical vapor deposition and plasma-enhanced chemical vapor deposition. We also developed a process for the growth of multilayer ZrB2-and BC x N y -based structures.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090, Russia

    V. S. Sulyaeva, V. A. Shestakov, Yu. M. Rumyantsev & M. L. Kosinova

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  1. V. S. Sulyaeva
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  2. V. A. Shestakov
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  3. Yu. M. Rumyantsev
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  4. M. L. Kosinova
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Correspondence to V. S. Sulyaeva.

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Original Russian Text © V.S. Sulyaeva, V.A. Shestakov, Yu.M. Rumyantsev, M.L. Kosinova, 2018, published in Neorganicheskie Materialy, 2018, Vol. 54, No. 2, pp. 146–152.

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Sulyaeva, V.S., Shestakov, V.A., Rumyantsev, Y.M. et al. Synthesis of Zirconium Diboride Films and ZrB2/BC x N y Heterostructures. Inorg Mater 54, 133–139 (2018). https://doi.org/10.1134/S0020168518020152

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  • DOI: https://doi.org/10.1134/S0020168518020152

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