Abstract
We have studied the formation of thin textured LiNbO3 films in originally amorphous samples produced by rf magnetron sputtering of a single-crystal target on silicon substrates containing a native oxide layer. The results demonstrate that postgrowth annealing leads to the formation of two phases, LiNbO3 and LiNb3O8, and that the percentage of the nonferroelectric phase LiNb3O8 is minimal after annealing at a temperature of 700°C. Annealing at 700°C is optimal because it ensures the lowest surface roughness of the film, the highest degree of structuring of the ferroelectric phase, and the maximum contrasts corresponding to the vertical and lateral components of the ferroelectric polarization in piezoresponse force microscopy.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Volpyan, O.D. and Kuzmichev, A.I., Otritsatel’noe prelomlenie voln. Vedenie v fiziku i tekhnologiyu elektromagnitnykh metamaterialov (Negative Refraction of Waves: Introduction to the Physics and Technology of Electromagnetic Metamaterials), Kiev: Avers, 2012.
Feigelson, R.S., Epitaxial growth of lithium niobate thin films by the solid source MOCVD method, J. Cryst. Growth, 1996, vol. 166, p. 1.
Tsukada, I. and Higuchi, S., Pulsed-laser deposition of LiNbO3 in low gas pressure using pure ozone, Jpn. J. Appl. Phys., 2004, vol. 43, no. 8A, p. 5307.
Lee, S.Y. and Feigelson, R.S., Reduced optical losses in MOCVD grown lithium niobate thin films on sapphire by controlling nucleation density, J. Cryst. Growth, 2006, vol. 186, no. 4, p. 594.
Zhukov, R.N., Kiselev, D.A., Malinkovich, M.D., et al., Ferroelectric grain polarization propagation in electrically isolated lithium niobate films, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., 2011, no. 4, p. 12.
Lee, T.-H., Hwang, F.-T., Lee, C.-T., et al., Investigation of LiNbO3 thin films grown on Si substrate using magnetron sputter, Mater. Sci. Eng., B, 2007, vol. 136, p. 92.
Volpyan, O.D. and Kuzmichev, A.I., Growth of optical coatings by medium-frequency magnetron sputtering, Prikl. Fiz., 2008, no. 3, p. 34.
Akazawa, H. and Shimada, M., Mechanism for LiNb3O8 phase formation during thermal annealing of crystalline and amorphous LiNbO3 thin films, J. Mater. Res., 2007, vol. 22, no. 2, p. 1726.
Kiselev, D.A., Bykov, A.S., Zhukov, R.N., et al., Study of LiNbO3 single crystals with a regular domain structure by piezoresponse force microscopy, Crystallogr. Rep., 2012, vol. 57, p. 781.
Johann, F., Jungk, T., Lisinski, S., et al., Sol-gel derived ferroelectric nanoparticles investigated by piezoresponse force microscopy, Appl. Phys. Lett., 2009, vol. 95, p. 202.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © D.A. Kiselev, R.N. Zhukov, A.S. Bykov, M.I. Voronova, K.D. Shcherbachev, M.D. Malinkovich, Yu.N. Parkhomenko, 2014, published in Neorganicheskie Materialy, 2014, Vol. 50, No. 4, pp. 453–456.
Rights and permissions
About this article
Cite this article
Kiselev, D.A., Zhukov, R.N., Bykov, A.S. et al. Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films. Inorg Mater 50, 419–422 (2014). https://doi.org/10.1134/S0020168514040074
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020168514040074