Abstract
Thin SnO2<Sb> films grown by pulsed laser deposition have been characterized by X-ray diffraction, optical spectroscopy, and scanning electron microscopy. The carrier mobility and concentration in the films have been determined as functions of target composition (0–8 at % Sb) using Hall effect measurements, and the resistivity of the films has been measured by a four-probe technique. The lowest resistivity (ρ = 2 × 10−3 Ω cm) and the highest transmission (≃ 85%) of the films in the spectral range 400-800 nm have been obtained at a target composition Sb/(Sn + Sb) = 2 at %. The observed variation in the resistivity of the films is determined by changes in carrier concentration to a greater extent than by changes in carrier mobility. X-ray photoelectron spectroscopy results demonstrate that the predominant charge state of the antimony in the films is Sb5+.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Shinar, R., Zhou, Z., Choudhury, B., and Shinar, J., Structurally integrated organic light emitting device-based sensors for gas phase and dissolved oxygen, Anal. Chim. Acta, 2006, no. 568, pp. 190–199.
Bruk, L., Fedorov, V., Sherban, D., et al., Isotype bifacial silicon solar cells obtained by ITO spray pyrolysis, Mater. Sci. Eng., B., 2009, nos. 159–160, pp. 282–285.
Pinheiro, C., Parola, A.J., Pina, F., et al., Electrocolorimetry of electrochromic materials on flexible ITO electrodes, Solar Energy Mater. Solar Cells, 2008, no. 92, pp. 980–985.
Hermann, J., Portefaix, J., and Forissier, M., Electrical behaviour of powdered tin-antimony mixed oxide catalysts, J. Chem. Soc., Faraday Trans. 1, 1979, vol. 75, pp. 1346–1355.
Leite, D.R., Mazali, I.O., Aguiar, E.C., et al., The effect of Sb and Nb on the electrical conductivity of tin dioxide based ceramics, J. Mater. Sci., 2006, vol. 41, pp. 6256–6259.
Han, J.B., Zhou, H.J., and Wang, Q.Q., Conductivity and optical nonlinearity of Sb doped SnO2 films, Mater. Lett., 2006, vol. 60, pp. 252–254.
Ma, J., Hao, X., Xu, X., et al., RF magnetron sputtering deposited on organic substrates, Solid State Commun., 2002, vol. 121, pp. 345–349.
Ni, J., Zhao, X., Zheng, X., et al., Electrical, structural, photoluminescence and optical properties of p-type conducting, antimony-doped SnO2 thin films, Acta Mater., 2009, vol. 57, pp. 278–285.
Elangovan, E. et al., Studies on structural and electrical properties of sprayed SnO2:Sb films, J. Cryst. Growth, 2005, vol. 276, nos. 1–2, pp. 215–221.
Kim, H., Transparent conducting Sb-doped SnO2 thin films grown by pulsed-laser deposition, Appl. Phys. Lett., 2003, vol. 84, no. 2, pp. 218–220.
Kim, D., Improvement of structural and optoelectrical properties by post-deposition electron beam annealing of ITO thin films, Renewable Energy, 2011, vol. 36, pp. 525–528.
Maki, K., Komiya, N., and Suzuki, A., Fabrication of thin films of ITO by aerosol CVD, Thin Solid Films, 2003, no. 445, pp. 224–228.
Cho, H. and Yun, Y.H., Characterization of indium tin oxide (ITO) thin films prepared by a sol-gel spin coating process, Ceram. Int., 2011, no. 37, pp. 615–619.
Rhaleb, H.E., Benamar, E., Rami, M., et al., Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis, Appl. Surf. Sci., 2002, no. 201, pp. 138–145.
Eason, R., Pulsed laser deposition of thin films: Applications-led growth of functional materials, Hoboken: John Wiley & Sons, 2007.
Petukhov, I.A., Shatokhin, A.N., Putilin, F.N., et al., Pulsed laser deposition of conductive indium tin oxide thin films, Inorg. Mater., 2012, vol. 48, no. 10, pp. 1020–1025.
Novodvorsky, O.A., Gorbatenko, L.S., Panchenko, V.Ya., et al., Optical and structural characteristics of Ga-doped ZnO films, Semiconductors (S.-Peterburg), 2009, vol. 43, no. 4, pp. 419–424.
Zuev, D.A., Lotin, A.A., Novodvorskii, O.A., et al., Pulsed laser deposition of ITO thin films and their characteristics, Semiconductors (S.-Peterburg), 2012, vol. 46, no. 3, pp. 410–414.
Herrera, M., Casto-Rodriguez, R., Gomez, O., et al., Multitarget system for growth of thin films by pulsed laser deposition, Rev. Mex. Fis., 2002, vol. 1, no. 48, pp. 61–66.
Terrier, C., Analysis of antimony doping in tin oxide thin films obtained by the sol-gel method, J. Sol-Gel Sci. Technol., 1996, vol. 10, pp. 5–81.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © I.A. Petukhov, L.S. Parshina, D.A. Zuev, A.A. Lotin, O.A. Novodvorsky, O.D. Khramova, A.N. Shatokhin, F.N. Putilin, M.N. Rumyantseva, V.F. Kozlovskii, K.I. Maslakov, V.K. Ivanov, A.M. Gaskov, 2013, published in Neorganicheskie Materialy, 2013, Vol. 49, No. 11, pp. 1211–1215.
Rights and permissions
About this article
Cite this article
Petukhov, I.A., Parshina, L.S., Zuev, D.A. et al. Transport properties of thin SnO2〈Sb〉 films grown by pulsed laser deposition. Inorg Mater 49, 1123–1126 (2013). https://doi.org/10.1134/S0020168513100099
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020168513100099